Diffusion chamber used in semiconductor manufacturing process and diffusion method thereof

Abstract

The invention relates to a diffusion chamber and a diffusion method used in process of producing semiconductor. A diffusion source is changed into a plane, parallel to a semiconductor sample, from points through a diffusion control device, namely, distances from the diffusion source to all areas of the sample are equal, the concentration degree and diffusion depth can be controlled, and the diffusion flux can be controlled in the semiconductor production process; the diffusion concentration and depth uniformity can be greatly improved, the concentration of source materials are evenly distributed in the semiconductor sample, and further the overall uniformity and yield of the sample can be greatly enhanced. The diffusion control device and a diffusion route thereof are close to the diffusion source (the source materials), once the source materials are volatilized, the diffusion control device can firstly play a blocking role, so that the lower surface of the diffusion control device is fast filled with the source material uniformly, then the source materials are redistributed by the diffusion route so as to uniformly arrive at all areas of the sample.

Description

technical field [0001] The invention relates to a method and device for dopant diffusion in the semiconductor manufacturing process, in particular to a method and device for controlling the diffusion process by controlling the diffusion path in the semiconductor manufacturing process. Background technique [0002] Over the past few decades, semiconductors have become important components in the electronics industry due to their miniaturization, light weight, multi-functionality and other characteristics. The modern electronics industry may require semiconductor devices with more specialized functions, such as semiconductor transistors, solar cells, light emitting diodes (LEDs), silicon controlled rectifiers, photodiodes, digital and analog integrated circuits. [0003] Photodiodes have been used in military, optical communications, information technology, and energy, among other fields. Photodiodes work by absorbing photons, or charged particles, and generating a current in...

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Problems solved by technology

Likewise, Ben-Michael does not disclose or discuss the parameters of the diffusion path from the diffusion source to the wafer and how to uniformly diffuse material onto the substrate

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