Light beam small displacement measurement method and measurement device
A technology of micro-displacement and measuring equipment, applied in the field of physical optics, can solve problems such as poor measurement accuracy and complicated operation, and achieve the effects of convenient operation, high measurement accuracy, and clear process
Active Publication Date: 2014-03-12
SHANGHAI UNIV OF ENG SCI
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[0003] At present, although the measurement instruments for optical micro-displacement in the world have high precision, the operation is complicated, and the measurement accuracy is poor, and can only measure to about a few hundred microns.
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[0026] A method for measuring the tiny displacement of a light beam, the principle of the method is as follows figure 1 shown, including the following steps:
[0027] (1) The vertical distance x from the plane where the centerline of the cylindrical mirror is located 0 The laser light at is projected onto the cylindrical mirror, and reflected to the observation screen by the cylindrical mirror x 1 place;
[0028] (2) After the laser transmitter moves a small displacement dx, the vertical distance from the plane where the center line of the cylindrical mirror in step (1) is x 0 The laser at +dx is projected onto the cylindrical mirror and reflected to the observation screen by the cylindrical mirror x 2 place;
[0029] (3) by the formula 1 / dx = ( 8 h x 0 2 a + b ...
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The invention relates to a light beam small displacement measurement method and a measurement device. The method comprises the following steps: a laser which is away from a plane at which the centre line of a cylindrical mirror is located for a vertical distance of x0 is projected onto the cylindrical mirror, and reflected onto an observation screen at x1 through the cylindrical mirror; after the laser transmitter is moved for a small displacement dx, the laser which is away from a plane at which the centre line of the cylindrical mirror is located for a vertical distance of x0+dx is projected onto the cylindrical mirror, and reflected onto the observation screen at x2 through the cylindrical mirror; the small displacement dx can be calculated through a formula, wherein in the formula, h is the distance between the centre line of the cylindrical mirror and the observation screen, r is the radius of the cylindrical mirror, a and b are constants, a=r2-x02, and b=2x02-r2. The device comprises the laser transmitter, a three-dimensional movement platform, the cylindrical mirror and the observation screen. The laser transmitter is arranged on the three-dimensional movement platform. The cylindrical mirror and the laser transmitter are located on a same height. The observation screen is located on the side surface of the laser transmitter and the cylindrical mirror. Compared with the prior art, according to the invention, advantages of simple structure, convenient operation, low device production cost, convenient repair and maintenance and high measurement accuracy can be realized.
Description
technical field [0001] The invention relates to the field of physical optics, in particular to a method and equipment for measuring the micro-displacement of light beams. Background technique [0002] Micro-displacement measurement is the premise and basis for the realization of fine machining, and it has always been an object of intense research in the field of physics. For the measurement of light micro-displacement, the subject is still in the stage of technological development, and has not yet formed absolute subject and technical advantages at home and abroad. [0003] At present, although the measurement instruments for optical micro-displacement in the world have high precision, the operation is complicated, and the measurement accuracy is poor, and can only measure to about a few hundred microns. [0004] Based on the beam translation theory and method of the Gus-Hanchen displacement effect, we conduct research on the measurement of small displacements. Using the c...
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Inventor 张朝民刘玲曹丽杰
Owner SHANGHAI UNIV OF ENG SCI