A fully integrated complementary metal oxide semiconductor (CMOS) fourier transform infrared (FTIR) spectrometer and raman spectrometer and method thereof

Abstract

A Fourier Transform Infrared (FTIR) Spectrometer integrated in a CMOS technology on a Silicon-on-Insulator (SOI) wafer is disclosed. The present invention is fully integrated into a compact, miniaturized, low cost, CMOS fabrication compatible chip. The present invention may be operated in various infrared regions ranging from 1.1 [mu]m to 15[mu]m or it can cover the full spectrum from 1.1 [mu]m to 15[mu]m all at once. The CMOS-FTIR spectrometer disclosed herein has high spectral resolution, no movable parts, no lenses, is compact, not prone to damage in harsh external conditions and can be fabricated with a standard CMOS technology, allowing the mass production of FTIR spectrometers. The fully integrated CMOS-FTIR spectrometer is suitable for battery operation; any and all functionality can be integrated on a chip with standard CMOS technology. The disclosed invention for the FTIR spectrometer may also be adapted for a CMOS-Raman spectrometer.

Description

technical field [0001] The invention relates to the field of spectrometry. Background technique [0002] Complementary Metal Oxide Semiconductor (CMOS) technology has become a mature manufacturing technology that can be mass-produced to reduce costs. Existing Fourier Transform Infrared (FTIR) spectrometers are only suitable for use in laboratory environments due to their bulky size, including many optical devices, lenses and movable parts, resulting in high cost. In recent years, miniaturized FTIR spectrometers have come into the market. Some integrate micro-electromechanical systems (MEMS), and some use optical fibers. These miniaturized FTIR spectrometers are all as small as boxes, and their costs are still high. And still use more vulnerable optical components, lenses and movable mirrors. FTIR spectrometers in the near-infrared region, mid-infrared region and long-wave infrared region (such as 1.1 μm-15 μm) have a large number of applications. These infrared light regi...

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Problems solved by technology

[0004] Not only the optics, lenses and movable parts in the spectrometer mentioned above are prone to misalignment or failure, but also the control method of adjusting the speed of the movable lens by controlling the actuator (actuator) through the laser will increase the complexity of the traditional FTIR spectrometer and cost

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