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Two-dimension motion platform with adjustable pitching

A two-dimensional motion platform and pitch adjustment technology, which is applied to the parts of the instrument, the instrument, the shell, etc., can solve the problem that the pitch attitude of the optical probe cannot be adjusted, and achieve the effect of keeping the attitude unchanged and improving work efficiency

Active Publication Date: 2014-03-19
CHINA ELECTRONIC TECH GRP CORP NO 2 RES INST
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The invention provides a two-dimensional motion platform with adjustable pitch, which solves the problem that the pitch attitude of the optical probe of the existing flip-chip bonding machine cannot be adjusted, and makes the existing two-dimensional motion platform have a pitch function

Method used

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  • Two-dimension motion platform with adjustable pitching

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Embodiment Construction

[0010] The present invention is described in detail below in conjunction with accompanying drawing:

[0011] A pitch-adjustable two-dimensional motion platform, comprising a marble table top 1, an XY platform 2 is arranged on the marble table top 1, a pitch adjustment right-angle triangle plate 3 is arranged above the XY platform 2, and a pitch adjustment right-angle triangle plate 3 is arranged at a right angle The bottom surface is provided with a fixed pillar 4, and the bottom end of the fixed pillar 4 is connected with a fixed pillar air cushion 5, and an X-direction adjustment nut 10 is arranged at an acute angle of the pitch adjustment right-angled triangle 3, and on the other side of the pitch adjustment right-angle triangle 3 An acute angle is provided with a Y-direction adjusting nut 12, the upper end of the X-direction adjusting screw 6 is screwed together with the X-direction adjusting nut 10, the lower end of the X-direction adjusting screw 6 is connected with an X-...

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Abstract

The invention discloses a two-dimension motion platform with adjustable pitching. Working efficiency of a current flip-chip bonding machine is low and operation working strength is large. By using the platform of the invention, the above problems are solved. The platform comprises an XY platform (2) arranged on a marble platform surface (1). A pitching adjustment right angle triangle plate (3) is arranged above the XY platform (2). A fixing brace (4) and an air cushion are arranged on a bottom surface of a right angle of the pitching adjustment right angle triangle plate (3). An adjusting nut and the air cushion are arranged at two acute angles. A gas floatation surface is formed between the air cushion and the marble platform surface so that a posture and XY motion do not influence each other. By using the platform of the invention, the posture of an optical probe remains the same. The working efficiency of the flip-chip bonding machine is increased.

Description

technical field [0001] The invention relates to a pitch-adjustable XY motion platform, which is applied to precision machinery, especially electronic special equipment, and is a four-degree-of-freedom motion platform with adjustable pitch attitude. Background technique [0002] On the high-precision flip-chip bonding machine, the two-dimensional motion platform is the key equipment. An optical probe device with a vision system is installed on the two-dimensional motion platform to realize the precise alignment of the chip and the substrate and complete the visual scanning function. , the pitching attitude of the optical probe directly affects the alignment accuracy of the chip and the substrate. The existing two-dimensional motion platform does not have a pitch function, and cannot adjust the attitude of the optical probe. Contents of the invention [0003] The invention provides a two-dimensional motion platform with adjustable pitch, which solves the problem that the pi...

Claims

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Application Information

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IPC IPC(8): G12B5/00G12B9/10
Inventor 王晓奎曹国斌王贵平狄希远吕琴红姬臻杰张志耀霍灼琴杨凯骏杨卫王海珍田志峰马生生孙丽娜
Owner CHINA ELECTRONIC TECH GRP CORP NO 2 RES INST
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