An Optimal Processing Method in the Measurement-Polishing Correction System of Ultra-Precision Convex Mirror
A processing method and technology of convex conical mirror, which can be used in grinding/polishing equipment, optical surface grinder, parts of grinding machine tools, etc., and can solve the problem of not finding it
Active Publication Date: 2016-05-25
SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT
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In these research papers and methods, there are not many methods for the measurement and polishing of convex cone mirrors in ultra-precision machining, and there is no method for correction using optimization processing.
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[0036] In order to make the object, technical solution and advantages of the present invention more clear, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0037] Send the convex cone mirror processed by ultra-precision diamond cutting lathe to TaylorHobson profiler (see Figure 8 ) for detection, the file format of the detection data given by the TaylorHobson profiler is shown in Figure 8 , where the first column is the x-axis coordinate point, the second column is the y-axis coordinate point, and the third column is called the processing allowance, that is, the thickness that needs to be polished theoretically (a negative value means that the processing or polishing is too much) .
[0038] image 3 It shows the display diagram of 4 sets of me...
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An optimizing processing method in a super-precision convex cone mirror measuring-polishing correction system comprises the following steps of (1) measuring: sending a convex cone mirror machined by a super-precision diamond drill cutting lathe to a Taylor Hobson contourgraph for detection and obtaining 4 or 8 groups of detection data files of measuring data; (2) data processing, selecting the feature values in each group of data by an algorithm, and constructing a reticular three-dimensional landform correction image data file based on the feature values; (3) inputting the three-dimensional landform correction image data file into the computer of a Zeeko seven-axis numerical control correction polishing center, wherein the computer guides a polishing tool to polish the convex cone mirror according to the three-dimensional landform correction image data file, so the mirror surface achieves the mirror finish. The polishing for the convex cone mirror can achieve the demand of the mirror finish by only a few groups of measuring data.
Description
technical field [0001] The invention belongs to ultra-precision machining, in particular to an optimization processing method in an ultra-precision convex cone mirror measurement-polishing correction system. Background technique [0002] In the current optical processing, the measurement-polishing method of the convex aconic mirror is as follows: the convex aconic mirror is sent for inspection after finishing or polishing, and the testing instrument gives a set of measurement data of a straight line passing through the apex (see figure 1 , figure 2 ), the size and size of the measurement data represent the processing effect of the measurement point respectively. Generally, the closer the value is to 0, the better. The actual effect is measured by the polishing measurement accuracy (pv value: the maximum peak-to-valley value of the surface topography); then According to the principle of cone symmetry, the polishing machine only performs polishing correction on the entire co...
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IPC IPC(8): B24B1/00B24B49/02
CPCB24B13/00B24B49/02
Inventor 张俊顾亚平乔维明查雨
Owner SHANGHAI MODERN ADVANCED ULTRA PRECISION MFG CENT