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Height adjustment type scanning electron microscope sampler holder

A scanning electron microscope, height adjustment technology, applied in the direction of circuits, discharge tubes, electrical components, etc., to achieve the effects of convenient operation, improved detection quality and efficiency, and simple structure

Inactive Publication Date: 2014-04-02
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a height-adjustable scanning electron microscope sample holder, which aims to solve the problem of simultaneous testing of samples of different heights

Method used

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  • Height adjustment type scanning electron microscope sampler holder

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Embodiment Construction

[0014] like figure 1 As shown, the height-adjustable scanning electron microscope sample holder includes a rotating base 1 for placing samples and adjusting the position of the sample, a sleeve 2 and a spring 3 fixed on the sample stage, and the bottom surface of the rotating base 1 is convexly provided with a center Shaft, the central shaft is sleeved with a spring 3, the lower end of the central shaft is screwed with the sleeve 2 through the thread C, the axis of the sleeve 2 is coaxial with the axis of the central shaft, and the upper end of the spring 3 is connected with the lower end of the rotating base 1. The bottom surface abuts against, and the lower end of the spring 3 abuts against the upper top surface of the sleeve 2 . The upper end of the sleeve 2 is protruded with a step B, which facilitates the positioning of the sample holder on the sample stage. The rotating base 1 is provided with a clamping groove A along the radial direction, which is convenient for insta...

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Abstract

The invention relates to a height adjustment type scanning electron microscope sample holder. The height adjustment type scanning electron microscope sample holder comprises a rotary base for placing samples and adjusting the positions of the samples, a sleeve and a spring which are fixed on the sample holder, wherein the lower bottom surface of the rotary base is convexly provided with a central shaft; the spring is sleeved on the central shaft; the lower end of the central shaft is connected with the sleeve through screw threads in a rotating manner; the upper end of the spring abuts against the lower bottom surface of the rotary base; the lower end of the spring abuts against the upper top surface of the sleeve. Samples at different heights can be tested at the same time, and the positions of the samples can be flexibly adjusted before testing, so that the surfaces to be tested of the samples are close to the same height, and the testing quality and efficiency of the samples are improved.

Description

technical field [0001] The invention relates to a height-adjustable scanning electron microscope sample holder. Background technique [0002] Scanning electron microscope is a kind of electron optical imaging instrument. It scans the surface of the sample with a very thin electron beam. The interaction between the high-energy electron beam and the substance generates various signals. After these signals are received by an appropriate detector, they are amplified by an amplifier. Then it is sent to the picture tube for imaging, which has the characteristics of simple sample preparation, wide adjustable range of magnification, high image resolution and large depth of field. [0003] When observing the sample with a scanning electron microscope, the sample should be fastened in the sample chamber with a sample fixture with good conductivity. If the sample is not fixed well, the image will drift microscopically under the irradiation of the electron beam, and the conductivity wil...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20
Inventor 严永林
Owner SHAREATE TOOLS
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