MEMS microphone
A microphone and insulating support technology, applied in the field of microphones, can solve problems such as diaphragm rupture
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[0033] Such as figure 2 As shown, a MEMS microphone 200 includes a substrate 201 and a capacitive unit 203 disposed on the substrate 201 . The base 201 is made of semiconductor material, such as silicon, and has a through back cavity 202 , and an insulating layer 214 is disposed on the upper surface of the base 201 . The capacitor unit 203 is connected to the insulating layer 214 .
[0034] The capacitor unit 203 includes a back plate 204 , and a first diaphragm 205 and a second diaphragm 206 opposite to the back plate 204 and disposed on both sides of the back plate 204 . Insulators 207 are provided between the first diaphragm 205 and the back plate 204 and between the second diaphragm 206 and the back plate 204 . The insulating member 207 separates the first diaphragm 05 from the back plate 204 , and the second diaphragm 206 from the back plate 204 by a certain distance, and forms a first insulating gap 208 and a second insulating gap 209 respectively. A plurality of thr...
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