Cerium oxide polishing powder and preparation method thereof

A cerium oxide, polishing powder technology, applied in chemical instruments and methods, polishing compositions containing abrasives, other chemical processes, etc. Different abilities, no consideration of the material of the polishing object, etc., to achieve the effect of improving the effective utilization rate, improving the suspension, and improving the polishing accuracy

Active Publication Date: 2014-04-23
方复(上海)新材料科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0016] In addition, the current additives of polishing powder generally do not consider the material of the polishing object
Although glass is used for mobile phone touch control, optical glass, and liquid crystal display, the composition, hardness, and hydrolysis ability of the glass are all different, which leads to the pH of the polishing slurry in the polishing process of the polishing powder. Changes occur, which in turn affect the surface accuracy of polished products and the efficiency of polishing

Method used

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  • Cerium oxide polishing powder and preparation method thereof
  • Cerium oxide polishing powder and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] In 400kg pure water, add 100kg cerium carbonate (TREO is 45%, CeO 2 / TREO is 99.96%), slowly add hydrochloric acid under stirring conditions, until the pH is 1.5, filter to obtain a clear and transparent cerium chloride aqueous solution, and obtain solution A;

[0040] Add ammonium bicarbonate aqueous solution with a mass fraction of 5% slowly to solution A heated to 90°C until the pH is 6.5, and continue stirring for 4 hours after the addition.

[0041] Then dehydrated by centrifugation, and then roasted at 800 ° C for 5 hours to obtain 450 kg of cerium oxide; add 225 g of phosphate salts with a mass fraction of 50% each of sodium dihydrogen phosphate and disodium hydrogen phosphate, and pulverize by airflow until the D50 is 1.0 μm to obtain The rare earth polishing powder. figure 1 It is an XRD schematic diagram of the rare earth polishing powder obtained in Example 1 of the present invention.

Embodiment 2

[0043] In 234kg of pure water, add 100kg of cerium carbonate (TREO is 50%, CeO 2 / TREO is 99.99%), slowly add hydrochloric acid under stirring conditions, until the pH is 2.5, filter to obtain a clear and transparent aqueous solution of lanthanum cerium chloride, and obtain solution A;

[0044] Slowly add 10% aqueous ammonium bicarbonate solution into solution A heated to 95°C, and continue stirring for 2 hours after the addition. Then, it was dehydrated by centrifugation and roasted at 1000°C for 3 hours to obtain 500 kg of cerium oxide; 750 g of phosphate with a mass fraction of 50% each of sodium dihydrogen phosphate and disodium hydrogen phosphate was added, and it was pulverized by airflow until the D50 was 2.0 μm to obtain the described rare earth polishing powder.

Embodiment 3

[0046] In 400kg pure water, add 100kg cerium carbonate (TREO is 45%, CeO 2 / TREO is 99.98%), slowly add hydrochloric acid under stirring conditions, until the pH is 2.0, filter to obtain a clear and transparent aqueous solution of cerium chloride, and obtain solution A.

[0047] Slowly add ammonium bicarbonate aqueous solution with a mass fraction of 7% into solution A heated to 95°C until the pH is 7.0, and continue stirring for 4 hours after the addition.

[0048] Then it was dehydrated by centrifugation, and then roasted at 900°C for 4 hours to obtain 450 kg of cerium oxide; 450 g of phosphate salts with a mass fraction of 50% each of sodium dihydrogen phosphate and disodium hydrogen phosphate were added, and it was pulverized by airflow until the D50 was 1.5 μm to obtain The rare earth polishing powder.

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Abstract

The invention discloses cerium oxide polishing powder and a preparation method thereof. The cerium oxide polishing powder is characterized by consisting of cerium oxide and phosphate, wherein the weight content of phosphate is 3-15% of the amount of cerium oxide. Compared with the conventional preparation method, the preparation disclosed by the invention has the advantages of simple process, low cost and no generation of wastewater as the polishing powder is cerium oxide polishing powder and no F is introduced in the preparation process; and the cerium oxide polishing powder has the advantages that a product is not scratched in the polishing process of the product, the polishing precision is high and the like.

Description

technical field [0001] The invention relates to a cerium oxide polishing powder and a preparation method thereof, in particular to a cerium oxide polishing powder for thinning integrated circuits and liquid crystal displays and polishing phosphate neodymium glass and a preparation method thereof. Background technique [0002] Rare earth polishing powder is used for polishing lenses, flat glass, glass bulbs, glasses, watch cases, etc. It has the characteristics of fast polishing speed and high precision. Since the invention of rare earth polishing powder in the 1940s, the production volume and application volume have gradually increased. The production process of rare earth polishing powder has changed with the progress of rare earth separation process. In recent years, with the rapid development of the information industry, liquid crystal displays, flat-panel displays, optical components, etc. have more and more demands for polishing powder, and the requirements for polishi...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09K3/14C09G1/02
Inventor 赵月昌高玮蒙素玲郝祥杨晓琼贾长征
Owner 方复(上海)新材料科技有限公司
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