A multi-moving platform micro-nano scale moving and sample manipulation device

Abstract

The invention discloses a micro-nanoscale moving and sample operating device of a multi-movement platform. A Y-axis vacuum piezoelectric ceramic linear motor and a Y-axis sliding block guide rail are installed on a Y-axis base. An X-axis base is installed on a Y-axis sliding block. An X-axis vacuum piezoelectric ceramic linear motor and an X-axis sliding block guide rail are installed on the X-axis base. A Z-axis base is installed on an X-axis sliding block. A Z-axis vacuum piezoelectric ceramic linear motor and a Z-axis sliding block guide rail are installed on the Z-axis base. A Z-axis fine adjustment support is installed on a Z-axis sliding block. One end of a Z-axis piezoelectric ceramic actuator is installed on the Z-axis fine adjustment support, and an X-axis fine adjustment support is installed at the other end of the Z-axis piezoelectric ceramic actuator. One end of an X-axis piezoelectric ceramic actuator is installed on the X-axis fine adjustment support, and a Y-axis fine adjustment support is installed at the other end of the X-axis piezoelectric ceramic actuator. Through movements of three-dimensional rectangular coordinates, accurate positioning in a fine adjustment range, nanoscale movement positioning in mechanics, electrics, optics and temperature, nanoscale movement positioning of a mechanical probe needle and a probe and testing experiments for micro-nanoscale materials and devices are achieved.

Description

technical field [0001] The invention belongs to the technical fields of micro-nano-scale movement, sample manipulation, and experimental testing equipment, and in particular relates to a multi-mobile platform micro-nano-scale movement and sample manipulation device. Background technique [0002] At present, the scale range of micro-nano technology is 1nm-100μm. When studying the electrical, mechanical, optical, temperature, mechanical and other properties of materials, devices and structures in this scale, it needs to be carried out under some specific observation, characterization and detection systems, such as scanning electron microscope SEM, transmission electron microscope TEM, atomic force microscope AFM and ion beam focusing microscope FIB, etc. However, at the beginning of the design, SEM, TEM, FIB and other equipment were mainly used to observe the morphology of micro-nano structures and materials, as well as the structural properties of materials and devices, and ...

AI Technical Summary

Problems solved by technology

[0004] The present invention provides a method for solving the problems of the lack of three-dimensional Cartesian coordinate micro-nano-scale movement and operation measurement experimental devices suitable for electrical, mechanical, optical, temperature, and mechanical performance detection in China, which are expensive and have no intellectual property rights. Simple structure, convenient installation and use, and multi-moving platform micro-nano scale movement and sample manipulation device that improves work efficiency

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