Substrate conveying device
A technology for conveying devices and substrates, which is applied to conveyor objects, transportation and packaging, furnaces, etc., and can solve problems such as loss of production line operation and incomplete processing.
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Embodiment 1
[0025] A substrate transfer device, such as figure 1 As shown, the transmission mechanism 12 is included, and the transmission mechanism 12 is used to carry and transmit the substrate 14; the detection device 13, the detection device 13 is used to detect the damage degree of the substrate 14 on the transmission mechanism 12; at least one driving device 11, the driving device 11 is used for The driving control conveying mechanism 12 can at least move in a direction perpendicular to the conveying direction of the substrate 14 , so that a section can be created between two adjacent conveying mechanisms 12 .
[0026] The substrate conveying device provided by the embodiment of the present invention includes a conveying mechanism for conveying and carrying substrates, a detection device capable of detecting the damage degree of the substrate on the conveying mechanism, and at least one driving device, which can drive and control the conveying mechanism so that the relative An end f...
Embodiment 2
[0042] refer to image 3 , Figure 4 and Figure 5 , the driving device 11 can be two, and the two driving devices 11 can respectively correspond to the two ends of the conveying mechanism 12 perpendicular to the conveying direction of the substrate 14, and the connecting rod 112 is vertically arranged with the conveying mechanism 12; the motor 111 of the driving device 11 The driving link 112 drives the transmission mechanism 12 to move up and down horizontally.
[0043] image 3 and Figure 4 Among them, the driving device 11 also needs to be connected with the current transmission mechanism 12 through the connecting rod 112. At this time, the driving device 11 is set corresponding to the two ends of the current transmission mechanism 12 perpendicular to the transmission direction, so the connecting rod 112 can be connected with the current transmission mechanism. The firmware on the 12 fixes the connection.
[0044] Taking the connecting rod 112 of the driving device 1...
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