Method for manufacturing solar cell, and solar cell
A technology for solar cells and manufacturing methods, which are applied in the directions of final product manufacturing, sustainable manufacturing/processing, circuits, etc., can solve the problems of deterioration of power generation efficiency, decline of amorphous silicon films, and the inability of amorphous silicon films to resist moisture, etc. The effect of reduced power generation efficiency
Inactive Publication Date: 2014-05-28
SUMITOMO HEAVY IND LTD
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Problems solved by technology
The amorphous silicon film is not resistant to moisture, so there is a problem that when moisture and water vapor infiltrate from the gap with the glass substrate, the amorphous silicon film deteriorates and the power generation efficiency decreases
Method used
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Embodiment Construction
[0022] Hereinafter, an embodiment of a method for manufacturing a solar cell and a solar cell according to the present invention will be described in detail with reference to the drawings. In addition, in the description of the drawings, the same reference numerals are attached to the same elements, and repeated descriptions are omitted.
[0023] figure 1 It is a block diagram showing an embodiment of the manufacturing apparatus 100 for manufacturing the solar cell 10 of the present invention. figure 2 It is a figure showing the structure of the solar cell 10 which concerns on this embodiment.
[0024] (Solar battery)
[0025] First, refer to figure 2 The solar cell 10 will be described. The solar cell 10 generates electricity by the incidence of sunlight L. The solar cell 10 according to the present embodiment is a heterojunction back contact solar cell. The solar cell 10 includes a substrate 11 and a transparent conductive film (TCO: Transparent Conductive Oxide) 12 ...
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The invention provides a solar cell which can inhibit the decrease of power generation efficiency, and a method for manufacturing the solar cell. According to the solar cell in the present invention, a part corresponding to a second region (20B) is formed into a peroxidation state by injecting oxygen ions into the part and thus becomes a non-conductive insulating part (12B). A part of each a-Si layer (5, 6), which becomes a part which does not plays a role of a conductive part (12A) in a transparent conductive film (12), is also in a state of being covered by the insulating part (12B). Therefore, the formation of a pattern of the transparent conductive film (12) is conducted without using laser-induced thermal etching or an etching liquid, etc., and the degradation of the a-Si layers (5, 6) is inhibited by coverage by the conductive part (12A) and the insulating part (12B) of the transparent conductive film (12). To sum up, the decrease of power generation efficiency can be inhibited.
Description
technical field [0001] This application claims priority based on Japanese Patent Application No. 2012-251285 filed on November 15, 2012 and Japanese Patent Application No. 2013-120710 filed on June 7, 2013. The entire content of the application is incorporated in this specification by reference. [0002] The invention relates to a method for manufacturing a solar cell and the solar cell. Background technique [0003] As a solar cell, a solar cell in which a transparent conductive film of a predetermined pattern is formed on a substrate is known. For example, in the method of manufacturing a solar cell disclosed in Patent Document 1, a transparent electrode is formed on a glass substrate, and the transparent electrode is separated into long strips by laser etching. Furthermore, an amorphous silicon film is formed on the glass substrate on which the transparent electrode is formed. [0004] Patent Document 1: Japanese Patent Laid-Open No. 2005-235920 [0005] However, in t...
Claims
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IPC IPC(8): H01L31/20H01L31/0224
CPCH01L31/022425H01L31/022466H01L31/1884H01L31/202Y02E10/50Y02P70/50H01L31/04
Inventor 岩田宽村上喜信
Owner SUMITOMO HEAVY IND LTD