Device and method used for detecting surface shape errors of plate optical element

Abstract

The invention relates to a device and method used for detecting surface shape errors of a plate optical element. The device comprises an optical element support, matching liquid and a matching liquid containing tank. When a vertical interferometer is used for measuring the plate optical element, the device can eliminate interference caused by reflective light of a rear optical surface of the plate optical element on surface shape error detection of the front optical surface, so that reliable optical surface shape error distribution of the optical surface is detected. By means of the device and method, the problem that a common vertical interferometer can not detect the surface shape errors of the plate optical element can be effectively solved, the device and method are simple in principle, manufacturing and use cost is low, and detection of the surface shape errors of the plate optical element can be finished on the condition that an original vertical interferometer structure is not changed. The surface shape errors of the optical element are detected in a non-contact mode, the optical element is not damaged, clamping stress does not exist, the optical element can be cleaned with tap water during the detection process of the surface shape errors of the optical element, and special cleaning solvents and methods are not needed.

Description

technical field [0001] The invention relates to the technical field of optical element detection, in particular to a device and method for detecting surface error of flat optical elements. Background technique [0002] The surface error of optical components is generally measured by interferometer by interferometry. However, in the detection of high-precision flat optical components, the front and rear optical surfaces will reflect light, and the reflected light can be reflected back along the original path, which can interfere with the reference wavefront and form interference fringes on the image detector, that is The reflected light from the rear optical surface interferes with the detection of the front optical surface, making it impossible to effectively detect the surface error of the front optical surface. Taking typical optical glass with a refractive index of n=1.55 as an example, in an atmospheric environment, after calculation, when the light is vertically incide...

AI Technical Summary

Problems solved by technology

That is, the reflected light energy of the rear optical surface and the front optical surface is very close, and the reflected light of the rear optical surface interferes greatly with the surface error detection of the front optical surface, and cannot form effective interference fringes, so that the detected optical surface cannot be effectively detected surface error

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