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Method and device for measuring homogeneously reflective surfaces

A reflective surface, confocal technology, used in measurement devices, optical devices, instruments, etc., to achieve the effect of shortening the measurement time interval

Inactive Publication Date: 2014-06-04
SIEMENS AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] For example, the surface to be measured may be curved and specularly reflective

Method used

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  • Method and device for measuring homogeneously reflective surfaces
  • Method and device for measuring homogeneously reflective surfaces
  • Method and device for measuring homogeneously reflective surfaces

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Embodiment Construction

[0038] figure 1 A first embodiment of the device according to the invention is shown. The uniform reflective surface 7 of the object B positioned in an orthogonal x, y, z coordinate system should be measured. Figure 1 shows a confocal sensor system A in which a light emitting system and a light detecting system are focused to a common focal point BP. The confocal sensor system has a light source 1 which emits light in the direction of a surface 7 to be measured. This light can pass through the diaphragm 3 and be focused at the focal point BP by means of the focusing device 5 . If this light is reflected at the focal point BP, it is detected in a detection device 15 , for example by means of a beam splitter 11 . A diaphragm 13 can be arranged upstream of the detection device 15 for generating a defined beam path. The aperture 3 likewise produces a beam course of the light source 1 along the optical axis 4 in the direction to the surface to be measured 7 of the object B posi...

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Abstract

The invention relates to a confocal sensor system (A) by means of which a focal point (BP) generated thereby is moved along a visual axis (4), orthogonal to the x, y plane of an x, y, z coordinate system, to a target z coordinate of a point (P) to be measured of a surface (7) to be measured of an object (B), wherein a light intensity (I(z)) of the light reflected by the surface (7), which is dependent on a distance of the focal point (BP) along the z axis to the point (P), is detected and is used in determining the actual z coordinate (Zp) of the point (P) by means of an evaluation device (21).

Description

technical field [0001] The present invention relates to a device and a method for measuring especially curved, homogeneous and reflective surfaces of objects positioned in an orthogonal x, y, z coordinate system. Background technique [0002] Conventionally, so-called deflectometry is used for shape measurements of specularly reflective surfaces. But this conventional method is relatively imprecise. [0003] Furthermore, confocal shape measurements of surfaces are known, in which relatively large objects are required due to the curvature of the mirror. Confocal shape measurements of surfaces are routinely time-intensive. Conventional systems are relatively expensive. Conventional systems are not suitable for highly curved surfaces due to their relatively large optics. Due to the size of conventional optics, not all surface parts to be measured can be reached with conventional sensor systems. [0004] For example, the surface to be measured may be curved and specularly r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B11/24
CPCG01B11/0608G01B11/22G01B2210/50
Inventor D.格哈德W.格根M.韦伯
Owner SIEMENS AG