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Movable electrical devices with movable electrodes

A technology for electrical equipment and moving electrodes, which is applied in the field of electrical equipment and can solve problems such as adhesion

Inactive Publication Date: 2016-09-21
FUJITSU LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, if the driving voltage is increased, the sticking phenomenon is more likely to occur

Method used

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  • Movable electrical devices with movable electrodes
  • Movable electrical devices with movable electrodes
  • Movable electrical devices with movable electrodes

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0041] In a digital variable capacitance element, the formed capacitance is the minimum value in the state where the movable electrode and the fixed electrode are separated (OFF state), and the formed capacitance is in the state where the movable electrode is in contact with the fixed electrode through a dielectric film (ON state). ) is the maximum value. A variable capacitor is used in both states. In many cases, it is necessary to set the ratio of the capacitance in the OFF state to that in the ON state within the design range.

[0042] figure 1 1A to 1C are cross-sectional views showing three states of a variable capacitance element having a simplified shape. Such as figure 1 As shown in FIG. 1A, a fixed electrode 103 and an insulating layer 112 are stacked on the surface of the substrate 101, and a fixed member 106 supported on the surface of the substrate 101 supports the movable electrode 104 with a beam structure fixed at both ends. The movable electrode 104 is se...

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PUM

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Abstract

A movable electric device capable of suppressing displacement of a movable electrode due to thermal expansion is provided. The movable electric device has: a supporting substrate; first and second fixed electrodes formed on the supporting substrate, having opposing electrode surfaces substantially perpendicular to the surface of the supporting substrate, and defining inner electrodes between the opposing electrode surfaces. Cavity; movable part, which has a movable electrode and a curved spring part, the first end of the movable electrode is close to the first fixed electrode, the second end is close to the second fixed electrode, the curved spring part is connected to the first end of the movable electrode, At least one of the second ends is continuous and includes a portion bent in the thickness direction of the movable electrode; the first and second fixing members are disposed on the support substrate and support both ends of the movable portion.

Description

technical field [0001] Embodiments of the invention relate to electrical devices having movable electrodes. Background technique [0002] In mobile phones, car radars, and the like, there are variable capacitors and switches as electrical devices used in a radio frequency (RF) band of 500 MHz to 100 GHz. [0003] Generally, a variable capacitance element is configured by arranging a fixed electrode and a movable electrode facing each other, and changing the capacitance by displacing the movable electrode. In order to prevent short circuits, for example, the surface of the fixed electrode is covered with a dielectric film. A switch can be formed by allowing the movable electrode to be in contact with the fixed electrode without covering the surface of the fixed electrode with a dielectric film. The movable electrode can be displaced by piezoelectric driving, electrostatic driving, or the like. Small and light weight is demanded in portable electronic devices, and we have d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01G5/16B81B3/00H01H59/00H10N97/00
CPCH01G5/16H01G5/18H02N1/006H01H59/0009H01H2059/0045H01H2001/0078H01H2059/0072H01L21/6835H01L21/687H01L28/60
Inventor 岛内岳明豊田治上田知史
Owner FUJITSU LTD