Workpiece locating system, loading system and plasma processing device
A technology for positioning systems and workpieces, applied in the direction of electrical components, conveyor objects, transportation and packaging, etc., can solve the problems of taking out workpieces, position deviation, and reducing the transmission efficiency of the loading system, so as to improve the transmission efficiency and process efficiency. Effect
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[0027] To enable those skilled in the art to better understand the technical solutions of the present invention, the workpiece positioning system, loading system and plasma processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0028] Figure 2a It is a cross-sectional view of the workpiece positioning system provided by the first embodiment of the present invention. Figure 2b for Figure 2a A cross-sectional view taken along line A-A and line A'-A'. Figure 2c It is a top view of the workpiece positioning system provided by the first embodiment of the present invention. Please refer to Figure 2a , Figure 2b with Figure 2c , The workpiece positioning system includes a workpiece conveyor 20 and a position calibration device. Among them, the workpiece conveying belt 20 is two parallel and spaced strip conveying belts, and on the workpiece conveying belt 20, along the conveying direction of the workp...
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