Modular filtration system

Abstract

The present disclosure relates to modular filtration systems using removable filter cassettes for filtering liquids including, for example, liquids used in semiconductor manufacturing. A filtration system may include a removable filter cassette having a filter inlet port and a filter outlet port, a filter cassette holder configured to receive and retain the filter cassette, and a main assembly. The main assembly can further comprise a filter inlet interface port configured to receive the filter inlet port, and a filter outlet interface port configured to receive the filter outlet port and can define flow paths to direct flow to and from the filter cassette. The filter cassette holder may be movably coupled to the main assembly such that the filter cassette is movable relative to the main assembly from an unmated position to a mated position.

Description

[0001] related applications [0002] This application claims US Provisional Patent Application No. 61 / 542,645, filed on October 3, 2011, and entitled "Modular Filtration System" and filed on March 21, 2012, entitled "Modular Filtration System." System (Modular Filtration System)" of US Provisional Patent Application No. 61 / 613,886, both of which are hereby incorporated by reference in their entirety. technical field [0003] The present invention relates to filtration systems. More particularly, the embodiments described herein relate to modular filtration systems. Even more particularly, embodiments described herein relate to modular filtration systems for filtering semiconductor manufacturing fluids. Background technique [0004] Semiconductor manufacturing processes are highly sensitive to contamination because even the deposition of fine particles on semiconductor wafers can lead to defects. Therefore, ultra-clean filters with membranes for removing sub-micron partic...

AI Technical Summary

Problems solved by technology

One disadvantage is that a circular pleated membrane overly restricts fluid flow because the membrane must be brought closer together towards the center to achieve a circular configuration

Another disadvantage is that the cylindrical shell is molded or extruded as a single piece making it difficult or impossible to add geometry extending perpendicular to the axis of the cylinder

In many cases, filters are connected in a fixed configuration by multiple units making it difficult to change the flow through the filter from serial to parallel if desired

Additionally, many filtration systems use only a single type of filter, limiting the ability to use different filters for different purposes or particle sizes in a single filtration system

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