Manufacturing method of semiconductor device
A manufacturing method and semiconductor technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electric solid-state devices, etc., can solve problems such as bridging and incomplete bottom etching, and reduce the possibility of shrinkage at the bottom of openings and defects Effect
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[0026] A method for manufacturing a semiconductor device according to an embodiment of the present invention will be described below. However, it can be easily understood that the embodiments provided in the present invention are only used to illustrate the making and use of the present invention in a specific way, and are not intended to limit the scope of the present invention. Furthermore, in the drawings and descriptions of the embodiments of the present invention, the same reference numerals are used to denote the same or similar components.
[0027] Figure 3A to Figure 3J is a schematic plan view illustrating a manufacturing method of a semiconductor device according to an embodiment of the present invention. Furthermore, Figure 1A to Figure 1J and Figure 2A to Figure 2J , which are respectively plotted corresponding to Figure 3A to Figure 3J Schematic cross-sectional view of the manufacturing method of the semiconductor device along the line I-I' and correspondin...
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