Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope

Abstract

The invention discloses a silicon micro full-decoupling dual-mass dual-line vibratory gyroscope which comprises a base, a first substructure, a second substructure and a substructure connecting device, wherein the first substructure and the second substructure are connected through the substructure connecting device; the first substructure and the second substructure are angular velocity measurement structures; each angular velocity measurement structure comprises a mass block, a first fixing base fixed on the base, a second fixing base fixed on the base, a third fixing base fixed on the base, a fourth fixing base fixed on the base, a first driving mechanism, a second driving mechanism, a first detection mechanism, a second detection mechanism, a first driving parallel beam, a second driving parallel beam, a first detection parallel beam, a second detection parallel beam and multiple U-shaped folded beams.

Description

technical field [0001] The invention belongs to micro-electro-mechanical systems and micro-inertial measurement technologies, in particular to a silicon micro fully decoupled dual-mass dual-line vibration gyroscope. Background technique [0002] The silicon micromechanical gyroscope is an inertial sensor for measuring the rotational angular velocity. It uses the Coriolis effect generated by the vibrating mass when it is driven by the base to measure the angular velocity of the base rotation. Compared with the traditional electromechanical gyroscope and photoelectric gyroscope It has the advantages of small size, low cost, light weight, high reliability, etc. It has important use value and broad application prospects in the field of military and civilian use. [0003] Since the end of the last century, many research institutions at home and abroad have started research on silicon microgyroscopes. Most of the silicon microgyroscopes developed by these institutions adopt a sing...

AI Technical Summary

Problems solved by technology

For single-mass silicon microgyroscopes, in the presence of axial acceleration interference, it is easy to cause electronic circuit saturation failure as a common mode interference, and finally seriously affect the work of silicon microgyroscopes

In recent years, a small number of institutions have conducted preliminary theoretical and experimental discussions on dual-mass silicon micro-gyroscopes, and most of them adopt non-decoupling or semi-decoupling designs. In the case of the effect, the vibration energy of the driving mode will also be coupled to the detection mode, resulting in the quadrature coupling error signal and the offset coupling error signal, and the influence of the non-decoupling design scheme on these two signals cannot be The semi-decoupled design can only partially reduce the impact of these two signals on the performance of the silicon micromachined gyroscope

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