Fine adjustment mechanism of movable lens

Abstract

The invention discloses a fine adjustment mechanism of a movable lens. A driving unit of the mechanism comprises a first motor and a second motor, an execution unit comprises a flexible structure and a fixing hinge, the flexible structure comprises a first driving end and a second driving end and is connected with a base in a rotating mode through the fixing hinge, the first motor is connected with the first driving end to provide driving force in the horizontal direction for the flexible structure, and the second motor is connected with the second driving end to provide driving force for the flexible structure to rotate with the fixing hinge as a fulcrum. By means of the fine adjustment mechanism of the movable lens, the movable lens can horizontally move and can rotate along an optical axis, and the more optimized adjustment effect is achieved.

Description

technical field [0001] The invention relates to lithography equipment, in particular to a movable lens fine-tuning mechanism in the lithography equipment. Background technique [0002] In the manufacturing process of semiconductor integrated circuits, the photolithography process is one of the most important steps. The photolithography process is to transfer the device or circuit pattern prefabricated on the mask plate to the required position through the exposure system, and accurately transfer it to the photoresist layer pre-coated on the wafer surface or dielectric layer through the projection objective lens. The quality of the lithography process will directly affect the feature size and product quality of semiconductor devices. Among them, the projection objective lens is used as its optical imaging system, and its aberration and distortion are important factors affecting the resolution and accuracy of lithography. The working environment and installation accuracy of t...

AI Technical Summary

Problems solved by technology

[0004] The invention provides a movable lens fine-tuning mechanism to solve the problem that the traditional movable lens fine-tuning mechanism cannot realize the translation of the movable lens in the horizontal direction and the rotation of the lens along the optical axis, and the center of the lens will deviate from the optical axis when the lens is flipped and fine-tuned The problem that the ideal compensation effect cannot be achieved

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