Two-dimensional resolution scanning imaging and infrared modulation photoluminescence spectrum test device and method

Abstract

The invention discloses a two-dimensional resolution scanning imaging and infrared modulation photoluminescence spectrum test device and method. The device comprises a Fourier transform infrared spectrograph with a stepping scanning function, a pumping light system serving as an excitation light source, a five-shaft adjustment and resetting control platform and a parallel correction system for precise positioning, and a chopper on a light path between a phase lock amplifier connected with a detector and a circuit control board in the Fourier transform infrared spectrograph and the pumping laser light source. The invention also provides the two-dimensional resolution scanning imaging and infrared modulation photoluminescence spectrum test method realizing band coverage on a wide band of 4-20 microns based on the device. The spectroscopy test device and method provided by the invention are used for detecting the optical property of a narrow semiconductor material and the uniformity of an energy band structural space, have the advantages of no loss and high sensitivity and are very suitable for detection on the uniformity of a planar space of a large-area infrared detector surface array material.

Description

Technical field: [0001] The invention relates to an infrared modulation photoluminescence spectrum experimental device and a testing method. It specifically relates to a two-dimensional resolution scanning imaging infrared modulation photoluminescence spectrum testing device and method, which is mainly based on the working mode of the fusion of step-scan Fourier transform infrared spectrometer and phase-sensitive detection technology, combined with isometric strong focusing, excitation light Long-term stable control of direction and intensity, coaxial visible excitation and infrared detection and other technologies to realize two-dimensional spatial resolution and scanning imaging infrared modulation PL spectroscopy experimental device and test method, which can be used for in-plane spatial resolution of large area array infrared detector materials And scanning imaging photoluminescence spectrum test, so as to characterize the uniformity of material parameters (such as alloy c...

AI Technical Summary

Problems solved by technology

[0003] However, in the 4-20 μm medium-long-wave infrared band, due to the fundamental limitations of the monochromator itself and the strong interference effect of room temperature background radiation, even single-point PL testing still has serious difficulties.

In order to overcome this difficulty, a dual-modulation PL spectroscopy method based on a fast-scanning Fourier transform infrared (FTIR) spectrometer has been developed internationally, but it is limited by the mechanism that the Fourier transform frequency and the modulation frequency of the excitation light are difficult to be completely separated. Limitations, spectral detection sensitivity, resolution, signal-to-noise ratio and test speed are difficult to improve, and it is difficult to obtain a single-point PL spectrum with a signal-to-noise ratio sufficient to ensure quantitative analysis, two-dimensional spatial resolution and imaging after several hours of testing PL spectrum test is out of the question

[0004] Aiming at the severe limitations faced by the existing PL spectroscopy technology in the infrared band, we disclose a two-dimensional spatial resolution and scanning imaging infrared modulation PL spectroscopy experimental device and testing method

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