A kind of preparation method of tin oxide film

A tin oxide and thin film technology, applied in tin oxide and other directions, can solve the problems of incomplete reaction, turbulent airflow, affecting the quality of the film layer, etc., and achieve the effects of good thickness consistency, smooth aerosol movement, and superior electrical conductivity.
CN103936059BActive Publication Date: 2015-08-26YANGZHOU MINGSHENG NEW TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
YANGZHOU MINGSHENG NEW TECH
Publication Date
2015-08-26

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Abstract

The invention discloses a preparation method of a tin oxide film, and belongs to the technical field of film preparation. The preparation method is as follows: a fluoride of antimony is used as a doping source, a chloride of tin is used as a starting raw material, after mixed atomization, the fluoride of antimony and the chloride of tin are deposited on the surface of a high temperature resistant substrate to from a transparent fluorine-antimony co-doping tin oxide thin film with good functions. According to the method, in a SnO2 crystal structure, fluoride ions replace part of oxygen ion positions, antimony ions replace part of tin ion positions for doping, and higher carrier density is obtained, so that the tin oxide film is better in electrical conductivity, atmosphere sensitivity, transmittance and the like than single fluorine or single antimony doping film, and is a very advanced and potential semiconductor functional thin film material.
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Description

technical field

[0001] The invention belongs to the technical field of film preparation, and relates to a water system atomization heat deposition preparation method of a fluorine-antimony co-doped tin oxide film. Background technique

[0002] The current preparation methods of different ion-doped tin oxide films mainly include sputtering deposition (PVD), chemical vapor deposition (CVD), and spray pyrolysis (SP) technology coating. Compared with PVD and CVD methods, the equipment and process of spray pyrolysis SP method are relatively simple, not only can prepare high-quality films, but also easy to dope, it is an economical, high-efficiency, large-scale, industrial film preparation method .

[0003] At present, conventional spray pyrolysis usually uses high-pressure liquid flow and high-pressure airflow to mix and spray to form high-speed moving atomized droplets, which hit and deposit on high-temperature substrates for thermal decomposition to form thin film deposition. ...

Claims

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