Processing method of main lens of large-OD (Outer Diameter) deformable mirror

A processing method and technology with large outer diameter, which can be used in metal processing equipment, manufacturing tools, grinding machines, etc., and can solve the problem of difficult processing of the main lens.

Active Publication Date: 2014-07-30
四川欧瑞特光电科技有限公司
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Problems solved by technology

[0003] The purpose of the present invention is to: aim at the above-mentioned existing problems, mainly solve the problem that the processing of the main mirror of the deformed mirror with large outer diameter and thin thickness is difficult, and provide a processing method for the main mirror of the deformed mirror with large outer diameter, which can be applied to The processing of the primary mirror of the deformable mirror with large size and relatively thin thickness can even be applied to the processing of high-precision flat mirrors or optical windows with a size-thickness ratio of more than 20 and less than 200

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  • Processing method of main lens of large-OD (Outer Diameter) deformable mirror
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  • Processing method of main lens of large-OD (Outer Diameter) deformable mirror

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[0023] All features disclosed in this specification, or steps in all methods or processes disclosed, may be combined in any manner, except for mutually exclusive features and / or steps.

[0024] Any feature disclosed in this specification (including any appended claims, abstract), unless otherwise stated, may be replaced by alternative features that are equivalent or serve a similar purpose. That is, unless expressly stated otherwise, each feature is one example only of a series of equivalent or similar features.

[0025] Such as figure 1 and figure 2 It is the main lens of the large outer diameter deformable mirror to be processed in the present invention, image 3 and Figure 4 It is a structural schematic diagram of the magnetic platen used in the present invention.

[0026] In this example, the lens processing of 420mm×420mm×3mm is preliminarily planned as a typical specification of the deformable mirror, and the transmitted wavefront is controlled at λ / 4. Among them,...

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Abstract

The invention discloses a processing method of a main lens of a large-OD (Outer Diameter) deformable mirror, and belongs to the technical field of processing a deformable mirror. The processing method of the main lens of the large-OD deformable mirror comprises the steps of selecting materials; processing a first surface; adhering an upper disk by adopting bee wax, and finely grinding a second surface through an annular fine grinding mode; magnetically pressing the upper disk, and polishing the second surface through an annular polishing mode; carrying out fine polishing processing by immersing parts in polishing solution; vibrating a lower disk by ultrasonic waves. According to the processing method of the main lens of the large-OD deformable mirror, disclosed by the invention, the problem that the processing of the primary lens of the deformable mirror in large OD and thin thickness is difficult can be mainly solved, the processing method is suitable for processing the primary lens of the deformable mirror in large size and thin relative thickness, and the processing method is even suitable for processing a high-accuracy plane mirror or an optical window of which a size and thickness ratio is greater than 20 and smaller than 200.

Description

technical field [0001] The invention relates to the technical field of processing deformable mirrors, in particular to a processing method for a primary mirror in a deformable mirror with a large outer diameter. Background technique [0002] Now there is more and more demand for space observation, and the turbulence of the atmosphere affects the accuracy of external observation, and the impact of turbulence on imaging increases the imaging wavefront error, making the resolution much lower; at the same time, the internal organs of the human body Observation also encounters similar problems. In view of this problem, various researches have been carried out on adaptive optics systems at home and abroad, and the processing technology of deformable mirrors has always been the bottleneck of research. The requirements for deformable mirrors are: When the multi-frequency vibration receives the feedback signal of the external turbulence, the multi-frequency vibration signal is given,...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B13/00
CPCB24B1/04B24B13/00
Inventor 范松如王建军
Owner 四川欧瑞特光电科技有限公司
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