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Method for calibrating effective spatial resolution of optical surface profilometer

A technology of optical surface and effective space, applied in the direction of using optical devices, instruments, measuring devices, etc., can solve the problems of high requirements and expensive calibration modules, and achieve the effect of high accuracy and low cost

Active Publication Date: 2014-07-30
润坤(上海)光学科技有限公司
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Problems solved by technology

Although the principle of this method of testing optical surface profilers is relatively basic, since different equipment covers different spatial frequency ranges, it is necessary to select calibration modules with different geometric quantities
Because this method has high requirements on the calibration module and is expensive, few optical surface profilers use this method for calibration

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  • Method for calibrating effective spatial resolution of optical surface profilometer
  • Method for calibrating effective spatial resolution of optical surface profilometer
  • Method for calibrating effective spatial resolution of optical surface profilometer

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Embodiment Construction

[0043] The present invention will be described in detail below in conjunction with the accompanying drawings and specific examples. The calibration sample selected in this example is a Si sheet with a thickness of 1 mm, denoted as Si-I. The selected calibration equipment is Veeco's atomic force microscope (MultiMode SPM), and the test areas for Si wafers are 10 μm × 10 μm, 5 μm × 5 μm, 2 μm × 2 μm and 1 μm × 1 μm. figure 1 The test results of one-dimensional power spectral density (PSD) in logarithmic coordinates are given in , and the power spectral density (PSD) curves of the four regions are almost on a straight line at the corresponding spatial frequency, which can prove that the Si chip Belongs to fractal surfaces. A straight line is fitted according to these four power spectral density (PSD) curves, and the equation of the straight line is y=-1.449x-0.119. According to the nature of the fractal surface, the power spectral density (PSD) curve of logarithmic coordinates a...

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Abstract

The invention relates to a method for calibrating the practical effective special resolution of an optical surface profilometer. A power spectrum density curve of a fractal surface is a line which has a slope factor -n under logarithmic coordinates. Through use of the regularity, an atomic force microscope is adopted to test a sample, which complies with the fractal surface, in different ranges (10 mum*10mum, 5mum*5mum, 2mum*2mum and 1mum*mum) and a fitting line of obtained PSD (power spectrum density) curves is used as a standard to calibrate the optical surface profilometer so as to realize an objective of determing the practical effective spatial resolution of the surface profilometer. The method for calibrating the effective spatial resolution of the optical surface profilometer is simple in principle and convenient to operate and capable of completing a calibration work while testing the ultra-smooth sample, significantly reducing the difficulty and cost of the calibration of the optical surface profilometer, determining the practical effective spatial resolution of the optical surface profilometer and quantitively giving a surface roughness in a practical spatial resolution range.

Description

technical field [0001] The invention relates to a method for calibrating the actual effective spatial resolution of an optical surface profiler, specifically referring to the method of using a calibration device (AFM) to test the fractal surface under different test ranges by using the properties of the power spectral density (PSD) of the fractal surface The linear fitting of the power spectral density (PSD) result, and the method of calibrating the calibrated optical surface profiler with the fitted straight line belong to the category of optical surface profiler calibration. Background technique [0002] In recent years, with the rapid development of scientific fields such as astrophysics, high-energy physics and medicine, the requirements for the imaging resolution of optical systems are getting higher and higher, and the requirements for the surface quality of optical components in these optical systems are also increasing. How can we Accurately reflecting the surface sh...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 王占山马爽蒋励沈正祥
Owner 润坤(上海)光学科技有限公司
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