Detection device for detecting deformation of quartz boat

Abstract

The invention provides a detection device for detecting deformation of a quartz boat. The detection device comprises a conveying shaft, at least one pointer and a dial plate, wherein the conveying shaft is vertically arranged on a working table and can move up and down along one side wall of the working table; the pointer is arranged between the conveying shaft and the quartz boat, on end of the pointer is fixedly arranged on the conveying shaft, and the other end of the pointer makes contact with one stand column on the quartz boat; the dial plate is arranged on the pointer. The detection device can extremely quickly, conveniently and accurately detect whether the quartz boat is expanded and deforms due to high temperature, so that the situation that silicon wafers are collided and fall off and then are fractured and damaged in the conveying process due to the deformation of the quartz boat is effectively reduced, and production efficiency and quality are improved.

Description

technical field [0001] The invention is applied to semiconductor processing equipment such as an atmospheric pressure furnace, and relates to a detection device for detecting whether a quartz boat is deformed. Background technique [0002] In semiconductor manufacturing, a quartz boat is a device used to place multiple silicon wafers at intervals in processing equipment such as an atmospheric pressure furnace (AP FNC, atmosphere pressure furnace). [0003] Such as figure 1 Shown is a schematic structural diagram of a quartz boat used in an atmospheric pressure furnace in the prior art, and the quartz boat 2 is vertically arranged on a bench (Bench) 1 in the atmospheric pressure furnace. The quartz boat 2 includes a plurality of upright columns 22 which are arranged around the outer wall of the quartz boat 2 at intervals. On the inner surface of the quartz boat 2 and along the vertical direction of the quartz boat 2 , a plurality of locking slots 21 are provided. Each card...

AI Technical Summary

Problems solved by technology

Therefore, due to being in the high-temperature environment in the furnace for a long time, the quartz boat 2 is prone to deformation after being used for a period of time, especially because the expansion of the quartz boat 2 will cause the gaps of each clamping groove 21 to shrink and deform, so that each clamping groove 21 no longer parallel settings between

In this case, if the silicon wafer is still pushed according to the originally set parameters, the edge of the silicon wafer may fall because it does not touch the card slot, or it may be damaged due to collision with the expansion part of the quartz boat 2. Fragmentation occurs, causing damage to silicon wafers or quartz boats, etc.

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