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Chemical sensor and method for manufacturing such a chemical sensor

A chemical sensor and sensing layer technology, which is applied in semiconductor/solid-state device manufacturing, scientific instruments, and electrochemical variables of materials, etc., can solve problems such as limited space, and achieve the effect of reducing manufacturing tolerances

Inactive Publication Date: 2014-08-06
SENSIRION AG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, top encapsulation requires space, which is limited especially in mobile electronic devices such as smartphones

Method used

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  • Chemical sensor and method for manufacturing such a chemical sensor

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Embodiment Construction

[0018] alone figure 1 A chemical sensor 1 according to the invention is described. The chemical sensor 1 comprises a substrate layer 2 having a front surface 2.1 and a rear surface 2.2. The substrate layer 2 preferably consists of silicon. On top of the substrate layer 2 is arranged a sensing layer 3 made of a dielectric material such as silicon oxide or silicon nitride. The sensing layer 3 includes sensing elements 4 . The substrate layer 2 has holes 5 at the rear surface 2 . 2 to form a membrane 6 containing the sensing element 4 .

[0019] The sensing element 4 preferably includes a fluid-sensitive, especially gas-sensitive thin film 7 and a heater 8 made of metal, which is used to heat the fluid-sensitive thin film 7 to promote the fluid to be measured and the fluid-sensitive thin film 7. chemical reaction. For this purpose, the fluid sensitive membrane 7 is formed on the front surface 3.1 of the sensing layer 3, while the heater 8 is located in the sensing layer 3 be...

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Abstract

The invention relates to a chemical sensor and a method for manufacturing such a chemical sensor. The chemical sensor (1) comprises a substrate layer (2) having a front surface (2.1) and a back surface (2.2) and a sensing layer (3) arranged on the front surface (2.1) of the substrate layer (2), wherein the sensing layer (3) comprises a sensing element (4); the substrate layer (2) is provided with a well (5) in the back surface (2.2) to a form a membrane (6) that incorporates the sensing element (4); the substrate layer (2) is provided with contact pads (10) on the back surface (2.2) and with through holes (11) extending from the front surface (2.1) to the back surface (2.2) for electrically connecting the sensing element (4) with the contact pads (10); a handling layer (17) is provided on top of the sensing layer (3), the handling layer (17) surrounding the sensing element (4), and the thickness (d1) of the handling layer (17) is larger than the thickness (d2) of the substrate layer (2).

Description

technical field [0001] The present invention relates to a chemical sensor and a method for manufacturing the chemical sensor. The chemical sensor can in particular be a gas sensor. Background technique [0002] A chemical sensor disclosed in eg GB2464016B comprises a semiconductor substrate having a front surface and a rear surface. A sensing element is formed on the front surface, which has a gas sensitive layer and a heater for heating the gas sensitive layer to promote a gas reaction with the gas sensitive layer. The gas sensitive layer is located between electrodes for providing an electrical output indicative of the gas reaction with the gas sensitive layer. A hole is formed in the rear surface of the substrate layer to form a membrane containing the sensing element. Such a chemical sensor can be used to measure properties of a fluid, and thus the analytes that make up the fluid, where the chemical sensor is exposed to the fluid through an opening / port in the housing...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/333
CPCG01N27/128G01N27/18G01N27/26H01L21/76802
Inventor F·迈尔M·莱希纳C·库尔敏R·胡梅尔罗伯特·苏尼尔
Owner SENSIRION AG
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