Air-permeable sheet, method for adsorbing object to be operated on adsorption unit, and method for manufacturing ceramic capacitor
A technology of operating object and air permeability, applied in capacitors, fixed capacitors, fixed capacitor dielectrics, etc., can solve the problems of easy inhalation, deformation and poor lamination of ceramic green sheets, deformation and lamination, etc., and achieve the effect of reducing damage to the operating object.
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no. 1 approach
[0059] In 1st Embodiment, the form which uses an air-permeable sheet as an adsorption sheet is demonstrated. Hereinafter, a method for adsorbing an object to be manipulated to the adsorption unit using the adsorption sheet of the present embodiment will be described. exist figure 1 In the illustrated adsorption step, the object 15 to be processed (for example, a ceramic green sheet) is adsorbed on the adsorption unit 14 . Arranged on the adsorption surface 13 of the adsorption unit 14 figure 1 In the shown suction sheet 4 , the operation object 15 is suctioned to the suction surface 13 through the suction sheet 4 . Specifically, the adsorption sheet 4 is arranged such that the first main surface 4 a of the adsorption sheet 4 faces (contacts) the adsorption surface 13 and the second main surface 4 b of the adsorption sheet 4 faces (contacts) the object 15 to be manipulated. . The adsorption unit 14 is connected to a pump (not shown) that generates suction in the adsorption ...
no. 2 approach
[0091] Image 6 The adsorption sheet 104 which is the air-permeable sheet of the second embodiment of the present invention is shown. Image 6 The illustrated adsorption sheet 104 includes a resin film 109 and a white layer 131 . The plan view when observing the sheet 104 for adsorption along the thickness direction is shown in Figure 7 . In addition, a cross-sectional view obtained by cutting the adsorption sheet 104 in a cross section parallel to the thickness direction is shown in Figure 8 .
[0092] The resin film 109 is the same film as the resin film 9 except that white particles are not dispersed therein. A straight hole 112 similar to the straight hole 12 is formed in the resin film 109 .
[0093] The white layer 131 is a layer containing the same material as that of the white particles 10, and is disposed on one main surface of the adsorption sheet 104 ( Image 6 In the second main surface 104b). The white layer 131 can be formed by, for example, coating pref...
Embodiment 1
[0102] In Example 1, making and Figure 2 ~ Figure 4 The same sample as the adsorption sheet 4 of the first embodiment shown.
[0103] First, a sheet (manufactured by Mitsubishi Plastics Corporation, W-100) in which white particles were dispersed was prepared. This sheet is a non-porous sheet containing 3.0% by weight of titanium oxide (white particles) with a particle diameter of 1.0 μm in a PET film having a thickness of 25 μm, based on the weight of the entire sheet.
[0104] Next, straight holes were formed on the sheet by ion beam irradiation and etching. The obtained straight pores have a pore diameter of 1.0 μm , the porosity of the sheet after forming the straight holes was 4.7%. The ion type of the ion beam used for ion beam irradiation is Xe, the acceleration voltage is 560 MeV, and the irradiation density is 6.0×10 6 ions / cm 2 , a vacuum of 10 -3 Grade Pa. The etchant used in the etching was a 0.5M NaOH solution at about 60°C. In this way, sample A was prod...
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Abstract
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