Mask plate and substrate marker manufacturing method

Abstract

The invention relates to the technical field of display, and discloses a mask plate and a substrate marker manufacturing method, so as to improve the accuracy of the manufacture of substrate markers, reduce the difficulty in product monitoring, and lower the manufacture cost. The mask plate comprises a display area mask part and at least a pair of test marker mask parts, wherein each pair of the test marker mask parts is positioned at both sides of the display area mask part and is opposite, the outside, far away from the display area mask part, of each test marker mask part is correspondingly provided with a protective marker mask part, and the picture contour of the protective marker mask part is bigger than the picture contour of the test marker mask part. When the mask plate is used to expose the adjacent two panel areas with double exposure areas, the effect that the size of the picture contour of a test marker is consistent with that in the theoretical design can be ensured even if the first exposure and the second exposure have position deviation. Therefore, the substrate marker manufacturing method can improve the accuracy of substrate marker manufacturing, reduce the difficulty in product monitoring, and reduce the production cost.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate and a marking method for a substrate. Background technique [0002] With the continuous improvement of production technology, the display panel production line has developed from the first generation line (glass substrate size is 300mm×400mm) to today’s tenth generation line (glass substrate size is 2850mm×3050mm), and new products are constantly being developed and put into production , the difficulty of product monitoring and management has intensified. Such as figure 1 As shown, in order to enable the test equipment to detect the relative position of the display panel on the substrate, each display panel is designed with test marks around the display area. [0003] In order to improve the utilization rate of the glass substrate, the area of ​​the display area is designed to be larger and larger. Limited by the precision of the exposure equipment, some test mark...

AI Technical Summary

Problems solved by technology

In the prior art, when making substrate marks, the exposure accuracy of the exposure equipment is extremely high. If there is a positional deviation between the first exposure and the second exposure of the substrate, it is easy to cause the manufactured test marks to be smaller than the theoretically designed graphic outline size. As a result, the purpose of testing cannot be achieved, which is not only unfavorable for product monitoring, but also may bring huge economic losses

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