An erbium-doped zinc nitride thin-film optical waveguide and its preparation method

Abstract

The invention relates to a preparation method for semiconductor material optical waveguide, in particular to an erbium-doped zinc nitride thin film optical waveguide and a preparation method. Erbium ions are tried to be doped to a novel zinc nitride semiconductor material thin film layer for the first time, the fact that the erbium-doped zinc nitride optical waveguide is prepared through the ion irradiation technology is proved to be feasible, and the zinc nitride optical waveguide is promoted greatly. In the erbium ion irradiation zinc nitride thin film process, irradiation energy is 300-600 KeV, implantation dose is 1014-1016 ions / cm <2>, and beam current density is 0.3-0.8 micron A / cm <2>; the included angle between the zinc nitride thin film surface normal direction and ion beam incident direction is 7 degrees; annealing treatment is carried out on erbium-doped zinc nitride thin film samples in nitrogen in a nitriding furnace. No zinc oxide is mixed in the zinc nitride thin optical waveguide prepared through the method, and purity is high. Erbium ions are distributed in a Gaussian distribution mode, erbium ions with the maximum concentration are concentrated in the middle of a thin film, luminous efficiency is remarkably improved, and fluorescence intensity gains are increased by 4-15 percent.

Description

technical field [0001] The invention relates to a method for preparing a semiconductor material optical waveguide, in particular to an erbium-doped zinc nitride film optical waveguide and its preparation method. Background technique [0002] Optical waveguide is a basic unit in the research field of modern integrated optics, which regulates the channel in the direction of light wave propagation. Optical waveguides play a central and important role in modern optical communications because of their excellent performance, high integration, and low manufacturing cost. Optical waveguides are widely used, mainly waveguide lasers and waveguide frequency doublers, waveguide amplifiers, optical path converters, polarizers, waveguide splitters, couplers, modulators, wavelength division multiplexers and demultiplexers, etc. Due to the important existence value of optical waveguides, researchers have been exploring various methods to prepare optical waveguides on different materials. ...

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Problems solved by technology

However, when the inventors adopted the erbium-doped zinc nitride optical waveguide prepared by the method disclosed in the reference document 1 according to the technical inspiration of the reference document 1, they found the following problem: the obtained erbium-doped zinc nitride film contained a large amount of zinc oxide , In addition, the erbium ions are too dispersed in the zinc nitride film layer, and the range distribution is poor; thus the refractive index of the erbium-doped zinc nitride film is too low, and a channel with high efficiency cannot be formed; an optical waveguide with high luminous efficiency cannot be obtained

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