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Nozzle Cleaning Unit And Nozzle Cleaning Method
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A nozzle and cleaning fluid technology, applied in electrical components, spray devices, semiconductor/solid-state device manufacturing, etc., to solve problems such as attachment and scattering of attached objects
Inactive Publication Date: 2014-09-24
KK TOSHIBA
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Abstract
Description
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Problems solved by technology
However, in a closed space, when the cleaning fluid is sprayed, the adhered matter removed from the nozzle to be cleaned may scatter and adhere to the nozzle again
Method used
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no. 1 Embodiment approach ］
[0021] figure 1 It is a schematic diagram for exemplifying the nozzle cleaning unit 1 of the first embodiment. In addition, in figure 1 Here, as an example, a coating apparatus 100 including a nozzle 102 to be cleaned is also shown.
[0022] First, the coating apparatus 100 will be described.
[0023] The coating apparatus 100 is provided with a mounting table 101, a nozzle 102, a coating liquid supply unit 103, a detection unit 104, and a moving unit 105.
[0024] The mounting table 101 holds the substrate W to be mounted. In addition, the mounting table 101 is rotated in a horizontal plane by a drive unit not shown. The holding of the substrate W can be performed, for example, by adsorption using a vacuum pump or the like not shown.
[0025] The nozzle 102 ejects the coating liquid L toward the surface of the substrate W. The nozzle 102 continuously ejects the coating liquid L to apply the coating liquid L to the surface of the substrate W. For example, the substrate W is a semi...
no. 2 Embodiment approach ］
[0126] Figure 8 It is a schematic diagram for exemplifying the nozzle cleaning unit 51 of the second embodiment.
[0127] In addition, in Figure 8 Here, as an example, a coating apparatus 100 including a nozzle 102 to be cleaned is also shown.
[0128] Picture 9 It is a schematic diagram for exemplifying the cleaning part 60.
[0129] Picture 10 It is a schematic cross-sectional view for illustrating the cleaning nozzle part 61.
[0130] Such as Figure 8 As shown, a cleaning unit 60 and a wiping unit 30 are provided in the nozzle cleaning unit 51.
[0131] Such as Picture 9 As shown, the cleaning unit 60 is provided with a cleaning nozzle unit 61, a container 12, a connection unit 13, a gas supply unit 14, a pressure reducing unit 15, a cleaning liquid supply unit 70 (corresponding to an example of a first cleaning liquid supply unit), and Recycling tank 16.
[0132] The cleaning liquid supply unit 70 is provided with a storage unit 22, a liquid supply unit 23 and a flow control u...
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Abstract
According to one embodiment, a nozzle cleaning unit includes: a cleaning nozzle unit; a gas supply unit; and a regulator. The cleaning nozzle unit has a first ejection hole that opens in a ring shape to an inner wall surface of an insertion part into which the nozzle is inserted. The gas supply unit supplies gas to the first ejection hole. The regulator reduces a pressure of an atmosphere of the insertion part on a side opposite a side in which the nozzle is inserted, sandwiching a position where the first ejection hole is provided.
Description
[0001] This application is based on Japanese Patent Application No. 2013-0059141 filed earlier on March 21, 2013 and claims priority, and the entire contents of which are incorporated herein by reference. Technical field [0002] The various embodiments described here relate to a nozzle cleaning unit and a nozzle cleaning method as a whole. Background technique [0003] There is a nozzle cleaning unit that sprays cleaning fluid to a nozzle that is a cleaning object, and then sprays air for drying to the nozzle. However, in a closed space, when the cleaning liquid is sprayed, the attached matter removed from the nozzle to be cleaned may be scattered and attached to the nozzle again. [0004] Therefore, it is desired to develop a technology that can effectively remove the adhering matter attached to the nozzle as the cleaning target. Summary of the invention [0005] Embodiments of the present invention provide a nozzle cleaning unit and a nozzle cleaning method that can effectively r...
Claims
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Application Information
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