Riple Arm Robot For Transmitting Panel

Abstract

The present invention relates to a panel transporting triple arm robot and, more particularly, to a panel transporting triple arm robot in which triple arms can be driven individually and panels, which are vertically loaded at a predetermined unit pitch, can be loaded and extracted at the same time. The panel transporting triple arm robot according to the present invention may be configured to include first to third robot hands which load the panels, are positioned in an up-and-down direction, and are in rectilinear motion on the same straight line; first to third robot arms which are respectively rail-coupled to the first to third robot hands so that the first to third robot hands can move horizontally and forward and backward; and a lower guide which is rail-coupled to lower rails of the first to third robot arms so that the first to third robot arms move forward and backward in the same direction as the forward and backward horizontal movement direction of the first to third robot hands.

Description

【Technical field】 [0001] The present invention relates to a three-arm robot for panel handling, in particular to a three-arm robot for panel handling that can individually drive three arms, load up and down with a certain frequency unit, and realize simultaneous loading and unloading of panels. 【Background technique】 [0002] In a manufacturing process of a semiconductor device or a liquid crystal display device, etc., a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device is subjected to an embedding and extraction process. [0003] The substrate processing devices (handling robots) being developed and used include dual-arm robots and handling robots composed of multiple arms. Usually, a handling robot includes the following structures: a carrier maintaining part, which holds multiple carriers; a substrate processing part, which processes the substrate; an inverting unit, which stacks up and down between the carrier maintaining pa...

AI Technical Summary

Problems solved by technology

[0009] Patent Publication No. 10-2012-0007449 of the Republic of Korea has the advantage of being able to effectively shorten the engineering time. However, due to its structural feature, there is a structure in which multiple manipulators are attached to one arm, so there is a disadvantage that it should be driven simultaneously.

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