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Confocal scanner and optical measuring device using it

A scanner and confocal technology, applied in the field of measuring devices using light, which can solve problems such as the reduction of light quantity

Inactive Publication Date: 2016-03-16
TAKAOKA TOKO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, if the object surface moves away from the position conjugated to the point light source 701, the amount of light passing through the pinhole 704 decreases rapidly

Method used

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  • Confocal scanner and optical measuring device using it
  • Confocal scanner and optical measuring device using it
  • Confocal scanner and optical measuring device using it

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Embodiment Construction

[0033] Hereinafter, an embodiment considered to be the best when implementing the present invention will be described.

[0034] First, refer to Figure 1 ~ Figure 4 An example of an embodiment in which the confocal scanner of the present invention is embodied will be described.

[0035] Such as figure 1 As shown, the confocal scanner of the present invention consists of a one-axis mobile worktable 101, a bracket 102 installed on the mobile workbench 101, an aperture array 103 and a movable prism 104, and a fixed fixed surface that is independently provided with the mobile workbench 101. Prism 105 constitutes.

[0036] Opening array 103 as figure 2 As shown, it is a pinhole array, and the interval P between each pinhole is set to be about several times of the diameter of the pinhole to present a confocal effect. Such as figure 2 As shown, adjacent pinholes in the direction of the moving axis are arranged with a slight distance S shifted in the direction perpendicular to...

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Abstract

A confocal aperture array and a moving prism with a wedge-shaped space inside are installed on a one-axis moving table, and a fixed prism with a wedge-shaped vertex is arranged outside the moving table. The XY scanning of the opening is realized by the movement of the moving table, and at the same time, the focus movement (Z scanning) is also realized at the same time through the pair of moving prisms and fixed prisms, which is equivalent to the thickness change of the parallel plane substrate.

Description

technical field [0001] The present invention relates to measuring devices using light. In particular, it relates to speeding up and simplifying an apparatus for three-dimensional measurement of an object or surface shape measurement using a confocal optical system. Background technique [0002] If an image is captured using a confocal optical system (hereafter, an image formed by a confocal optical system is referred to as a confocal image), the blurred and diffused light that is out of focus is not imaged, and only the part of the light that is in focus picture. In a general imaging optical system, the blurred light diffuses on the image plane due to lack of focus, making the image worse, but there is no such situation (or very few) in the confocal optical system, so a higher contrast can be obtained sharp image. In addition, it is also known that the three-dimensional shape of an imaging object can be measured by using the feature of imaging only the light of the in-foc...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/00G01B11/00G01B11/24
CPCG01B11/0608G01B11/24G02B7/1805G02B21/0044G01B9/04G01B11/30G02B21/00G02B26/00
Inventor 石原满宏
Owner TAKAOKA TOKO