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Purification method of trichlorosilane

A technology of trichlorosilane and purification methods, which is applied in the direction of halosilane and silicon halide compounds, and can solve the problems of easy blockage of the purification tower group

Active Publication Date: 2016-08-24
CHINA ENFI ENGINEERING CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to provide a method for purifying trichlorosilane, so as to solve the problem that the purification tower group is easily blocked in the rectification and purification process of the prior art

Method used

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  • Purification method of trichlorosilane

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] The crude trichlorosilane liquid is purified by a purification tower group. Wherein, the purification tower group includes a weight removal tower group and a light removal tower group, and the weight removal tower group is arranged upstream of the light removal tower group, and the weight removal tower group includes a first weight removal tower, a second weight removal tower and a second weight removal tower connected in sequence. Three light removal towers, the light removal tower group includes the first light removal tower and the second light removal tower connected in sequence, each tower is equipped with a forced circulation reboiler, and the liquid flow rate in the reboiler is 3m / s.

[0032] After 180 days of continuous operation, the pipeline of the first weight-removing tower was blocked.

Embodiment 2

[0034] Pass the crude trichlorosilane liquid through a standing liquid storage tank for 10 minutes, and pass the supernatant liquid into a purification tower group for purification. Wherein, the purification tower group includes a weight removal tower group and a light removal tower group, and the weight removal tower group is arranged upstream of the light removal tower group, and the weight removal tower group includes a first weight removal tower, a second weight removal tower and a second weight removal tower connected in sequence. Three light removal towers, the light removal tower group includes the first light removal tower and the second light removal tower connected in sequence, and each tower is equipped with a forced circulation reboiler. The liquid flow velocity in the reboiler was 5 m / s.

[0035] After 210 days of continuous operation, the pipeline of the first weight-removing tower was blocked.

Embodiment 3

[0037] Pass the crude trichlorosilane liquid through the static storage tank for 10 minutes, pass the supernatant liquid through the filter device for filtration so that the particle size in the filtrate is less than 100 mesh, and then pass the filtrate into the purification tower group for purification. Wherein, the purification tower group includes a weight removal tower group and a light removal tower group, and the weight removal tower group is arranged upstream of the light removal tower group, and the weight removal tower group includes a first weight removal tower, a second weight removal tower and a second weight removal tower connected in sequence. Three light removal towers, the light removal tower group includes the first light removal tower and the second light removal tower connected in sequence, and each tower is equipped with a forced circulation reboiler. The liquid flow velocity in the reboiler was 6 m / s.

[0038] After 240 days of continuous operation, the pi...

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Abstract

The invention discloses a method for purifying trichlorosilane. The method includes the steps of passing the crude trichlorosilane liquid into the purification tower group, and the step of passing the crude trichlorosilane liquid into the purification tower group includes: passing the crude trichlorosilane liquid into the purification tower group including at least two weight-removing towers The weight-removing tower group is successively subjected to weight-removing treatment to obtain the low boilers obtained by the weight-removing treatment; the low-boiling substances obtained through the weight-removing treatment are sent to the weight-removing tower group including at least one light-removing tower for successive de-lighting processed to obtain trichlorosilane. In this method, the crude liquid of trichlorosilane is firstly passed through the weight-removing column group and then passed through the light-removing column group, so that the crude liquid can be subjected to the weight-removing process and then the light-removing process. This configuration of continuous deweighting in the first stage and continuous delighting in the second stage can separate the impurities of silicon micropowder, high-boiling point chloride and high-boiling point metal chloride in the crude liquid during the deweighting process of the first stage, so as to separate these impurities which are easy to cause blockage. The impurities are concentrated in the front-end weight removal tower, reducing the blockage probability of the subsequent purification tower and reboiler.

Description

technical field [0001] The invention relates to the field of polysilicon production, in particular to a method for purifying trichlorosilane. Background technique [0002] Polysilicon is the basic material for manufacturing semiconductor devices, integrated circuits, and solar cell materials. It is the cornerstone of the information and energy industries, and it is also a strategic material that the country encourages and prioritizes development. At present, most of the polysilicon in the world is produced by the improved Siemens method. The method mainly includes five processes of trichlorosilane synthesis, rectification purification, reduction, tail gas recovery and hydrogenation. Among them, the rectification and purification process is an important process to ensure the purity of polysilicon. [0003] In the existing rectification and purification process, the crude trichlorosilane is purified through the purification tower group. Yet, in the synthesis process of tric...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C01B33/107
Inventor 姜利霞严大洲杨永亮肖荣晖汤传斌
Owner CHINA ENFI ENGINEERING CORPORATION
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