Manufacture method of planar optical waveguide

Abstract

The invention discloses a manufacture method of a planar optical waveguide. The manufacture method of the planar optical waveguide includes: forming a core layer on the surface of a substrate; forming a metal layer on the surface of the core layer; forming an optical resist layer on the surface of the metal layer, and patterning the optical resist layer; horizontally placing the substrate in an etching groove, and etching the metal layer by using the patterned optical resist layer as a photo mask; judging whether etching on the metal layer is completed, removing the patterned optical resist layer after the etching is completed, using the etched metal layer as a photo mask to etch the core layer, and patterning the core layer so as to form a waveguide core layer of preset structure; removing the etched metal layer and forming a protection layer on the surface of the waveguide core layer, wherein the surface of the substrate, provided with the metal layer, is placed upwards, and the metal layer is immersed into a metal etching reagent in the etching groove. The manufacture method of the planar optical waveguide reduces manufacture cost of the planar optical waveguide.

Description

technical field [0001] The invention relates to the technical field of semiconductor device manufacturing technology, and more specifically, relates to a method for manufacturing a planar optical waveguide. Background technique [0002] Planar optical waveguide devices are widely used in optical modulators, optical switches, optical power splitters, optical couplers, wavelength division multiplexers, optical filters, polarization divisions, etc. due to their small size, high integration, and good reliability. Optical products such as beamers and microlenses. refer to figure 1 , figure 1 It is a schematic structural diagram of a planar optical waveguide, including: a substrate 1 ; a waveguide core layer 2 arranged on the surface of the substrate 1 ; and a protective layer 3 covering the surface of the waveguide core layer 2 . [0003] When preparing an optical waveguide device, it is necessary to prepare a metal mask layer so as to form a waveguide core layer with a predet...

AI Technical Summary

Problems solved by technology

However, the use of a large amount of etching reagents leads to higher production costs of planar optical waveguides.

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