Control system and control method of robot

A control system and robotic arm technology, applied in manipulators, program-controlled manipulators, manufacturing tools, etc., can solve problems such as increased equipment cost and robotic arm blocking, and achieve the effect of solving robotic arm blocking and simple logic control.

Active Publication Date: 2014-11-26
EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0004] Aiming at the above-mentioned problems existing in the prefetching action of the robotic arm during the existing AMOLED processing, a robotic arm

Method used

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  • Control system and control method of robot
  • Control system and control method of robot
  • Control system and control method of robot

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Embodiment Construction

[0032] The present invention will be further described below with reference to the drawings and specific embodiments, but it is not a limitation of the present invention.

[0033] Such as figure 1 As shown, an embodiment of a robotic arm control system of the present invention is applied to a semiconductor manufacturing equipment controlled by an on-line equipment controller and provided with at least two processing cavities, which includes a control logic generating device, a controller, and a To load and unload the processing substrate mechanical device into the processing cavity, the control logic generating device is connected with the controller, and the controller is provided with instructions for controlling the mechanical device, and the controller is connected with the mechanical device to control the action of the mechanical device;

[0034] The control logic generating device includes a first data storage component and a monitoring component. The first data storage compo...

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Abstract

The invention discloses a control system and a control method of a robot, and is applied to semiconductor manufacture equipment which is controlled by a block controller and provided with at least two processing cavities. The control system of the robot comprises a control logic generation device, a controller, and a mechanical device for loading and unloading processing base materials in the processing cavities; the control logic generation device is connected with the controller, and provides an instruction of controlling the mechanical device to the controller; and the controller is connected with the mechanical device, and is used for controlling the operation of the mechanical device. The control system of the robot has the following beneficial effects: the blockage problem of the robot in the prior art can be solved under the precondition of not influencing the processing efficiency of the semiconductor manufacture equipment; the hardware setting of the semiconductor manufacture equipment is not added; and the logic control is simpler.

Description

Technical field [0001] The invention relates to a control system for semiconductor manufacturing equipment, in particular to a robot arm control system and control method. Background technique [0002] AMOLED is an active matrix organic light emitting diode display panel. Compared with traditional liquid crystal panels, AMOLED has the characteristics of faster response, higher contrast, and wider viewing angle. The production of AMOLED is generally realized by processing a substrate in multiple processes by semiconductor manufacturing equipment. When semiconductor manufacturing equipment is processing multiple processes, the processing substrate is generally loaded by the robotic arm of the loading and unloading unit of the semiconductor manufacturing equipment. Load or unload from the corresponding processing device. However, when dealing with multiple processes, especially when dealing with multiple processing cavities, in order to improve processing efficiency, the robot arm...

Claims

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Application Information

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IPC IPC(8): B25J9/16
CPCB25J9/1602
Inventor 周虹任唐山河胡堂林李健邱栓杉
Owner EVERDISPLAY OPTRONICS (SHANGHAI) CO LTD
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