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Semiconductor sensor output noise detection device and method

A technology for outputting noise and detecting devices, which is applied in the direction of noise figure or signal-to-noise ratio measurement, and can solve problems such as difficulty in outputting noise

Active Publication Date: 2017-06-09
HANGZHOU SILAN MICROELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the output noise of the semiconductor sensor is not only determined by the precision of its processing, and it is difficult to detect the output noise caused by the production process

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  • Semiconductor sensor output noise detection device and method
  • Semiconductor sensor output noise detection device and method
  • Semiconductor sensor output noise detection device and method

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Embodiment Construction

[0032] Various embodiments of the invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale.

[0033] figure 1 is a schematic diagram of a semiconductor sensor output noise detection device according to an embodiment of the present invention. Such as figure 1 As shown, the semiconductor sensor output detection device 1 includes a detection interface 11 , a reference sensor 12 and a processor 13 .

[0034] The detection interface 11 is used for connecting the sensor 2 to be detected, and transmitting the measurement value to be detected obtained by the sensor 2 to be detected to the processor 13 .

[0035] In this embodiment, the measured value of the detected output after the sensor 2 to be detected is connected to the semiconductor sensor output detection de...

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Abstract

Disclosed is a semiconductor sensor output noise detection device and method, the device comprising: a detection interface, used to connect to a sensor to be detected, and transmit the measured value to be detected obtained by the sensor to be detected to a processor; a reference sensor, used to Output the reference measurement value according to the external physical quantity; the processor is respectively connected to the detection interface and the reference sensor, calculates the first noise according to at least two measurement values ​​to be detected, calculates the second noise according to at least two reference measurement values, and calculates the second noise. The difference between the first noise and the second noise is used as the output noise. Thus, output noise due to the production process can be obtained. As a result, negative influences on the output noise measurement due to other factors can be avoided.

Description

technical field [0001] The invention relates to the technical field of testing, in particular to a semiconductor sensor output noise detection device and method. Background technique [0002] Micro-Electro-Mechanical System (MEMS) is a mixed digital and analog system. Under ideal conditions, due to the characteristics of semiconductor processing technology, semiconductor sensors based on MEMS inevitably have output noise. The quality of the processing process can be known by detecting the output noise of the semiconductor sensor. Therefore, the detection of the output noise of the semiconductor sensor is an optional way for quality control in production testing. [0003] However, the output noise of the semiconductor sensor is not only determined by the precision of its processing, and it is difficult to detect the output noise caused by the production process. Contents of the invention [0004] In view of this, a semiconductor sensor output noise detection device and met...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/26
Inventor 蒋登峰张波魏建中
Owner HANGZHOU SILAN MICROELECTRONICS