Divergent sensing apparatus and manufacturing method thereof

Abstract

The invention discloses a divergent sensing apparatus and a manufacturing method thereof. The divergent sensing apparatus comprises a lower structural body, an upper structural body, a plurality of divergent lines and a plurality of sensing electrode units, wherein a plurality of sensing circuit units are formed in the lower structural body, the upper structural body is arranged on the lower structural body along a vertical direction; the plurality of divergent lines are formed in the upper structural body and electrically connected with the sensing circuit units. Each divergent line comprises at least one horizontal extending section and at least one vertical extending section which are vertical each other. The plurality of sensing electrodes are formed in the upper structural body, and electrically connected with the divergent lines. The sensing electrode units sense biological characteristics of an organism to generate a plurality of sensing signals which are transmitted to the sensing circuit units through the divergent lines. The sensing circuit units process the sensing signals to obtain a plurality of output signals. The smallest distribution area covering the sensing circuit units is equal to or smaller than the smallest distribution area covering the sensing electrode units.

Description

technical field [0001] The present invention generally relates to a sensing device and a manufacturing method thereof, and in particular to a divergent sensing device and a manufacturing method thereof, as well as applying the sensing device to technologies such as fingerprint sensing. Background technique [0002] Traditional non-optical fingerprint sensing devices, such as electric field / capacitance, thermal sensing, pressure sensing and other fingerprint sensing devices, must sense the texture of the finger, so the sensing area needs to maintain contact with the finger area in order to obtain sufficient sensing accuracy. Taking the electric field / capacitive fingerprint sensor as an example, it has a plurality of sensing elements arranged in an array, and the area occupied by these sensing elements corresponds to the area of ​​the finger one to one. For example, in the design of a fingerprint sensor with a resolution of 500dpi, the pitch of the sensing elements in the sen...

AI Technical Summary

Problems solved by technology

For example, if the sensing array has 100×100 sensing elements, it will have a sensing area of ​​about 5mm×5mm. If the surrounding analog and digital circuits are added, the area of ​​the entire fingerprint sensor or chip will be quite large. , making the cost quite high

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