Method for manufacturing three-dimensional integrated inductor structure

An integrated inductance, three-dimensional technology, applied in the direction of inductors, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of increasing the inductance value, unable to increase the inductance magnetic flux, etc.

Active Publication Date: 2014-12-24
WUHAN XINXIN SEMICON MFG CO LTD
View PDF4 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the above problems, the present invention provides a method for preparing a three-dimensionally integrated inductance structure to solve the def

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method for manufacturing three-dimensional integrated inductor structure
  • Method for manufacturing three-dimensional integrated inductor structure
  • Method for manufacturing three-dimensional integrated inductor structure

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0034] In order to increase the magnetic flux of the inductor to increase the inductance value while reducing the eddy current, and improve the quality factor Q value and the performance of the inductor coil, it is necessary to prepare a three-dimensional integrated inductor structure, including: a metal frame, in the area surrounded by the metal frame There are a number of side-by-side chip cores, and the two ends of each core are fixed on the opposite sides of the metal frame; in addition, it also includes an inductance coil, which is in a three-dimensional spiral shape and surrounds the metal frame in multiple turns in one direction. on all cores in the area.

[0035] The present invention will be described in detail below in conjunction with specific drawings.

[0036] Such as Figure 1~8b...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to a method for manufacturing a three-dimensional integrated inductor structure. By means of the method, an inductor of a three-dimensional structure can be obtained. By manufacturing an induction coil which is formed by connecting a top metal wire with a bottom metal wire in parallel, passes around the magnet core with the magnet core as the center in one direction and is in a three-dimensional spiral shape, the vortex current can be reduced while the inductance is increased by greatly improving the inductance flux, the value Q of the quality factor is increased, and the performance of the inductance coil is improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a method for preparing a three-dimensionally integrated inductor structure. Background technique [0002] With the advancement of science and technology and the improvement of social informatization, more and more technical fields such as computers and communications use radio frequency technology, which promotes the rapid development of radio frequency technology (RFIC). For high frequency, small power consumption, low The requirements of distorted radio frequency technology make the inductance coil necessary. The inductance coil is wound on the lead frame by wires, and the wires are insulated from each other. The winding can be hollow or contain an iron core, referred to as inductance. The inductance is mainly used It is used to isolate and filter AC signals or form a resonant circuit with capacitors and resistors. The most important indicator for evaluatin...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): H01L21/71
CPCH01L28/10
Inventor 梅绍宁鞠韶复朱继锋
Owner WUHAN XINXIN SEMICON MFG CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap