Substrate case, substrate conveyance case, case cover, substrate conveyance system, and method for conveying substrate
A substrate handling and covering technology, which is applied in transportation and packaging, semiconductor/solid-state device manufacturing, containers, etc. It can solve the problems that it is difficult to lift and move the substrate handling box, achieve the effect of small and simple structure, and improve productivity
Active Publication Date: 2015-01-07
NIKON CORP
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- Application Information
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Problems solved by technology
As mentioned above, since the substrate is a heavy item, it is difficult for a person to lift the substrate carrier and move it
Method used
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[0068] Hereinafter, embodiments for implementing the present invention will be described with reference to the drawings. An example of a substrate box to which the present invention is applicable is shown in figure 1 and figure 2 , an example of a box cover applicable to the present invention is shown in Figure 12 , an example of a substrate handling box to which the present invention is applied is shown in Figure 17 and Figure 18 . figure 1 , Figure 17 Among them, (a) is a plan view of the substrate box 1 and the substrate transport box 7 viewed from above, (b) is a front view viewed from the front, and (c) is a side view viewed from the right side. figure 2 , Figure 18 It is a perspective view of the substrate box 1 and the substrate transfer box 7 viewed obliquely from above. In addition, in the description that follows, it is appended to figure 1 (a), Figure 12 , Figure 17 The directions of the arrows in (a) indicate the front, rear, left, and right o...
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Abstract
A substrate case (1) holds a large substrate with a diagonal dimension exceeding 2m and is used for conveying the substrate being held. The substrate case (1) comprises a lower case unit (20), provided with a substrate support section on the upper side for supporting the front, rear, left, and right edges of the substrate and provided with casters (30) on the lower side for movement, and an upper case unit (10), attached so as to cover from the top the substrate which is supported by the substrate support section. The casters (30) are configured so as to be mounted in a frame-shaped region that is within a first rectangle formed by the external shape of the substrate (2) held within the case (1) and outside a second rectangle formed by connecting the front-back direction Bessel points and the left-right direction Bessel points as calculated on the basis of the external shape of the lower case unit (20). This compact and simple configuration, adapted to the size of the substrate, makes it possible to stably move the substrate being held.
Description
technical field [0001] The present invention relates to a substrate box for accommodating and transporting a large rectangular flat substrate inside, a substrate transport box used in the substrate box, a box cover, a substrate transport system including the above, and a substrate using the above Handling method. Background technique [0002] As the above-mentioned rectangular plate-shaped substrate, there are glass substrates used in the manufacture of liquid crystal display (LCD) panels or plasma display (PD) panels, photomask The shadow step forms a photomask with a circuit pattern, etc. These substrates require high cleanliness in each of the manufacturing steps or subsequent steps, ie, the film formation step and the exposure step, and thus are produced in a clean room that maintains a cleanliness level of about class 100, for example. [0003] The produced substrates are housed in a substrate case (inner case) sealed in a dust-proof structure in a clean room. The af...
Claims
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Patent Timeline
Login to View More IPC IPC(8): B65D85/48B65D19/44B65D85/86G03F1/66H01L21/673
CPCB65D19/0073H01L21/67724H01L21/67353B65D2519/00338B65D2519/00323B65D2519/00293H01L21/67369B65D2519/00273B65D19/44B65D19/42B65D25/24B65D85/48H01L21/673Y02W30/80
Inventor 神林敬铃木瑛子安住美菜子
Owner NIKON CORP