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Vibration sensing device and electronic equipment

A technology of vibration sensing and electronic equipment, which is applied in the field of opto-mechanical, can solve the problems of low test accuracy and achieve the effect of improving test accuracy and simple structure

Inactive Publication Date: 2015-01-14
张驰 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the embodiments of the present invention is to provide a vibration sensing device, aiming to solve the problem of low test accuracy of existing vibration sensing devices

Method used

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  • Vibration sensing device and electronic equipment
  • Vibration sensing device and electronic equipment

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Experimental program
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Effect test

Embodiment 1

[0013] Such as figure 1 As shown, the vibration sensing device provided by the embodiment of the present invention includes a light source 1, a beam splitter 2 that divides the light emitted by the light source 1 into two beams, a vibrating membrane 3 for receiving one beam of light and a vibration signal, and a A beam combiner 4 that interferes with the beam of light reflected by the diaphragm 3 and an image processor 5 that acquires and processes the pattern generated by the interference. Here, the light emitted by the light source 1 is first divided into two beams, and then the diaphragm 3 receives one of the beams of light and the vibration signal, and makes the other beam of light interfere with the light reflected by the diaphragm 3, and then the interference occurs. image processing, so as to obtain the characteristics of the vibration signal acting on the diaphragm 3. Because the interference of light is extremely sensitive to disturbance, the vibration sensing device...

Embodiment 2

[0038] Different from Embodiment 1, one of the beams of light in this embodiment is the beam reflected by the first half-mirror 2 to the reflector 6, and the other beam of light is transmitted by the first half-mirror 2 To the light beam of the second half mirror 4; the light beam reflected by the reflector 6 is reflected again by the diaphragm 3 and superimposed with the light beam transmitted by the second half mirror 4, and the interference occurs, as figure 2 shown. The rest are the same as those in Embodiment 1, and will not be repeated here.

Embodiment 3

[0040] The difference from Embodiment 1 is that one of the beams of light in this embodiment is the beam projected to the diaphragm after being transmitted by the first half-mirror, and the other beam of light is reflected by the first half-mirror The light beam projected to the second half-mirror; the light beam reflected by the diaphragm is reflected again by the mirror and superimposed with the light beam transmitted by the second half-mirror, and the interference occurs. The rest are the same as those in Embodiment 1, and will not be repeated here.

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Abstract

The invention relates to the optical, mechanical and electrical technical field and provides a vibration sensing device and electronic equipment. The vibration sensing device comprises a light source, a light splitter, a vibration film, a beam combiner and an image processor, wherein the light splitter is used for dividing light emitted by the light source into two beams; the vibration film is used for receiving one of the two light beams and a vibration signal; the light combiner enables the other light beam to interfere in the light beam reflected by the vibration film; the image processor is used for obtaining a pattern generated by interference and processing the pattern. Light emitted by the light source is divided into two beams, the vibration film receives one light beam and the vibration signal, the other light beam interferes in light reflected by the vibration film, and the image generated by interference is processed, so that features of the vibration signal acted on the vibration film are obtained. Due to the fact that light interference is extremely sensitive to disturbance, the vibration sensing device can improve testing accuracy, and the structure is extremely simple. The vibration sensing device can be used in seismic detection, geological prospecting, microphones of audio instruments, underwater acoustic transducers of sonar, and the like.

Description

technical field [0001] The invention belongs to the field of optomechanical technology, and in particular relates to a vibration sensing device and electronic equipment. Background technique [0002] In the highly developed modern industry, it has become an inevitable development trend for modern testing technology to develop towards digitization and informatization. The front end of the testing system is the sensor, which is the soul of the entire testing system and is listed as cutting-edge technology by countries all over the world. It is the rapid development of IC technology and computer technology in recent years, which provides a good and reliable scientific and technological foundation for the development of sensors, making the development of sensors more and more rapid, and digitization, multi-function and intelligence are important for the development of modern sensors. feature. However, the existing vibration sensing devices have low accuracy and complex structur...

Claims

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Application Information

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IPC IPC(8): G01H9/00
Inventor 张驰代安琪
Owner 张驰
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