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Coating film fixture for coating film substrate

A substrate and fixture technology, applied in the field of coating fixtures, can solve problems such as troublesome, easy to change the inner size of the substrate, etc., and achieve the effect of convenient installation and high work efficiency

Inactive Publication Date: 2015-01-28
董新妹
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this grinding method is both troublesome and easy to change the inner size of the substrate.

Method used

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  • Coating film fixture for coating film substrate
  • Coating film fixture for coating film substrate
  • Coating film fixture for coating film substrate

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Embodiment Construction

[0019] The technical solutions of the embodiments of the present invention will be explained and described below in conjunction with the drawings of the embodiments of the present invention, but the following embodiments are only preferred embodiments of the present invention, not all of them. Based on the examples in the implementation manners, other examples obtained by those skilled in the art without making creative efforts all belong to the protection scope of the present invention.

[0020] refer to figure 1 with figure 2 , the coating fixture of a kind of coating film substrate shown, comprises upper splint 2 and lower splint 1, is provided with mounting hole 11 on the lower splint 1, is provided with positioning step 12 on the mounting hole 11, and substrate 6 is pressed by upper splint 2 Tightly on the positioning step 12, covering the outer ring of the substrate 6, a protective cap is connected on the upper splint 2, the protective cap includes a hollow pillar 41, ...

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Abstract

The invention discloses a coating film fixture for a coating film substrate, relates to the field of coating films and aims at solving the technical problems that an inner ring of the substrate is unblocked, a processing effect is poor and efficiency is low in the prior art. The coating film fixture for the coating film substrate comprises an upper clamping plate and a lower clamping plate, wherein a mounting hole is formed in the lower clamping plate, a positioning step is formed on the mounting hole, the substrate is compacted between the upper clamping plate and the positioning step, the upper clamping plate is connected with a protective cap opposite to the mounting hole, the protective cap comprises a hollow supporting column, an expansion sleeve is arranged at the bottom of the supporting column, the top of the supporting column is connected with a gas injecting pipe, and the expansion sleeve props against the bottom of the substrate after being aerated and expanded. The coating film fixture for the coating film substrate is applied to coating film processing of the substrate.

Description

【Technical field】 [0001] The invention relates to the coating field, in particular to a coating fixture. 【Background technique】 [0002] At present, Physical Vapor Deposition (PVD for short) is the most widely used thin film manufacturing method, which is widely used in many fields such as ceramics and optics, and is used to form metal electrodes and the like. The method is to heat the raw material to be formed in the evaporation container in a vacuum chamber, make its atoms or molecules gasify and escape from the surface, form a vapor flow, and condense to form a solid film after reaching the surface of the substrate (or substrate). method. When coating, it is generally necessary to use a fixture to hold the substrate. At the same time, since the steam is scattered in the air, the fixture should also have a protective function in order to prevent some places on the substrate where electrodes should not be formed, such as the side, from being evaporated. [0003] The exis...

Claims

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Application Information

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IPC IPC(8): C23C14/50
CPCC23C14/50
Inventor 董新妹
Owner 董新妹
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