Optics-based high-precision displacement sensor

Abstract

The invention relates to an optics-based high-precision displacement sensor. The sensor comprises a base, a measurement shaft, a spiral reference device, a CCD sensor, a controller, a display module and a manual control module, wherein the measurement shaft is vertically arranged at the center of the base, the measurement shaft is sleeved with the spiral reference device, the CCD sensor is arranged in the measurement shaft and is connected with the controller, both the display module and the manual control module are arranged on the base and connected with the controller, and the controller is arranged in the base; the displacement sensor is started through the manual control module, the spiral reference device rotates to generate displacement, the CCD sensor senses the change of an external light signal according to the rotation of the spiral reference device, converts the change of the light signal into an electric signal and transmits the electric signal to the controller, and the controller acquires the displacement amount of the spiral reference device according to the received electric signal and displays the displacement amount through the display module. Compared with the prior art, the sensor has the advantages of being high in resolution, not affected by the in-situ temperature and electromagnetic field, safe, reliable and the like.

Description

technical field [0001] The invention relates to a displacement sensor, in particular to an optical-based high-precision displacement sensor. Background technique [0002] At present, the displacement sensors commonly used in the industry mainly include potentiometer displacement sensors, inductive displacement sensors, capacitive displacement sensors, eddy current displacement sensors, Hall displacement sensors, etc. Among them, mechanical and resistive sensors can only be used Suitable for contact measurement; capacitive sensors can be used for non-contact measurement, but the range is relatively small, the accuracy is relatively low, and cannot meet the requirements of high-precision fields; while inductive sensors (such as LVDT displacement sensors) have good linearity and Larger range, but low measurement frequency. The above-mentioned existing sensors are all subject to different degrees of temperature, electromagnetic, and mechanical vibration interference in practica...

AI Technical Summary

Problems solved by technology

For example, Chinese patent CN203758459U discloses a grating displacement sensor based on a linear array CCD, which includes a housing, a light source for emitting light is arranged in the housing, and a light source for converting the light emitted by the light source into parallel light is provided behind the light source. The lens is fixed behind the lens with a grating mechanism with a variable grating slit width, and behind the grating mechanism is a linear array CCD module for detecting the diffraction image of the grating mechanism. The sensor has a simple structure and high measurement accuracy, but it has no anti-interference Aspects of consideration

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