Photoresist machine with temperature control function, temperature control system and temperature control method thereof

Abstract

The invention discloses a temperature control system and a control method thereof; the temperature control system comprises a hot chuck, a first temperature sensor, a temperature comparison device and a temperature controller; the hot chuck is arranged on an external machine table; the first temperature sensor is used for obtaining real-time temperature of the hot chuck; the temperature comparison device is used for obtaining real-time temperature of the hot chuck and connected with the first temperature sensor; the temperature controller is arranged on the external machine table and connected with the output end of the first temperature sensor and the output end of the temperature comparison device respectively; the working state of the first temperature sensor can be monitored in real time; signals whether the first temperature sensor works normally or not are sent into the temperature controller; the first temperature sensor is capable of obtaining the working temperature of the hot chuck of the machine table in real time and sending temperature signals into the temperature controller, so that the temperature controller can obtain accurate and reliable temperature signals; the temperature control reliability of the machine table can be improved; the production efficiency is increased; and the production cost is reduced.

Description

technical field [0001] The invention relates to the field of temperature control of a photoresist machine, in particular to a temperature control system, a photoresist machine with a temperature control function and a control method thereof. Background technique [0002] In the prior art, the temperature control of the KEM λ-3000 II photoresist machine is controlled by only one temperature controller, but once the temperature controller is abnormal, for example, the temperature reported by the temperature sensor is different from the actual temperature, etc., it cannot Realize the alarm to the machine, so that when the actual temperature of the photoresist machine has exceeded the working temperature, the photoresist machine will still continue to work, which will cause a large number of scrap products produced by the photoresist machine. The scrap rate of the photoresist machine is increased, the production cost is increased, and the production efficiency is reduced. Cont...

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Problems solved by technology

[0002] In the prior art, the temperature control of the KEM λ-3000 II photoresist machine is controlled by only one temperature controller, but once the temperature controller is abnormal, for example, the temperature reported by the temperature sensor is different from the actual temperature, etc., it cannot Realize the alarm to the machine, so that when the actual temperature of the photoresist machine has exceeded the working temperature, the photoresist machine will continue to work, which will cause a large number of scrapped products produced by the photoresist machine

Increased the scrap rate of photoresist machines, increased production costs, and reduced production efficiency

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