Array substrate manufacturing method, array substrate and display device

Abstract

The invention provides an array substrate manufacturing method, an array substrate and a display device. The array substrate manufacturing method comprises the steps that a first metal thin film is formed on an underlying substrate; and patterning processing is performed on the first metal thin film, a cathode pattern is formed on the first area of the underlying substrate, and a gate electrode pattern is formed on the second area of the underlying substrate. The cathode layer of a light-emitting diode and the gate electrode layer of a thin-film transistor are formed on different areas of the underlying substrate via a primary pattern composition technology so that complexity and technological time of an array substrate manufacturing technology can be reduced, the manufacturing process of an organic electroluminescent panel can be simplified and manufacturing cost can be reduced.

Description

Technical field [0001] The present invention relates to the field of display, in particular to a manufacturing method of an array substrate, an array substrate and a display device. Background technique [0002] Organic electroluminescent display panels are considered to have great application prospects in flat panel displays due to their self-luminous, all-solid-state, wide viewing angle, fast response, and many other advantages. They are new after liquid crystal (LCD) and plasma (PDP). A generation of flat panel display products. [0003] Traditional organic electroluminescence display panels mainly include organic light-emitting diodes (EL part) and driving thin film transistors. See figure 1 The driving thin film transistor mainly includes an active layer 2', a gate insulating layer 3', a gate 4', an intermediate insulating layer 5', a source and drain 6', and a flat layer 7'formed on the base substrate 1', The EL part mainly includes an anode layer 8'on the flat layer 7', a p...

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Problems solved by technology

[0003] The traditional organic electroluminescent display panel mainly includes two parts: organic light emitting diode (EL part) and driving thin film transistor, see figure 1 The driving thin film transistor mainly includes an active layer 2', a gate insulating layer 3', a gate 4', an intermediate insulating layer 5', a source and drain 6' and a flat layer 7' formed on a substrate 1', The EL part mainly includes an anode layer 8' on a flat layer 7', a pixel definition layer (PDL) 9', a cathode layer 11', and an organic light-emitting layer 10' between the anode layer 8' and the cathode layer 11'. In the manufacturing process of the electroluminescent display device, the above two parts need to be formed by different manufacturing processes, and the organic light emitting diode process of the EL part needs to be carried out after the driving thin film transistor process is completed, and the manufacturing processes of both are relatively complicated. , resulting in the problems of many steps, long time and high cost in the manufacturing process of the organic electroluminescent display panel

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