Crucible for sublimed OLED material vapor plating

Abstract

The invention provides a crucible for sublimed OLED material vapor plating. The crucible comprise a body portion (1) and an upper cover portion (2) connected with the body portion (1), the center of the top of the upper cover portion (2) is provided with an air outlet (21), the internal surface of the body portion (1) has conicity, and the internal diameter of one side of the body portion (1) close to the upper cover portion (2) is greater than the internal diameter of one side of the body portion (1) far from the upper cover portion (2). The inner wall of the crucible is designed to have certain conicity, and the OLED material residual after the OLED material is sublimated settles under the action of gravity and continuously fully contacts with the inner wall of the crucible, so heating is full, and the stability of the vapor plating rate is guaranteed.

Description

technical field [0001] The invention relates to the field of OLED manufacturing process, in particular to a crucible for evaporation of sublimation OLED materials. Background technique [0002] OLED is a flat panel display technology with great development prospects. It has excellent display performance, self-illumination, simple structure, ultra-thin, fast response, wide viewing angle, low power consumption and flexible display. Known as the "Dream Display". In addition, the investment in its production equipment is much smaller than that of TFT-LCD, which has won the favor of major display manufacturers and has become the main force of the third-generation display devices in the field of display technology. At present, OLED is on the eve of mass production. With the further deepening of research and the continuous emergence of new technologies, OLED display devices will surely have a breakthrough development. [0003] There are two process routes for the preparation of t...

AI Technical Summary

Problems solved by technology

However, the existing crucibles for evaporation of OLED materials such as figure 1 As shown, it includes a main body 100, an upper cover 200 connected to the main body 100, and an air outlet 210 located at the center of the upper cover 200, and the inner wall of the main body 100 for accommodating the OLED material 300 is cylindrical. Solid matter lacks fluidity, so it is very likely to occur during the material sublimation process such as figure 2 In the situation shown, after the OLED material is heated, the OLED material in contact with the inner wall of the crucible sublimates first, turns into gaseous molecules and runs away, and the remaining solid OLED material cannot flow, so the remaining OLED material cannot fully contact the inner wall of the crucible, resulting in sublimation The speed is unstable

If the device is running in a fixed rate mode, in order to maintain the sublimation rate, the device will continue to heat up to increase the temperature, which is very likely to exceed the cracking temperature of the OLED material, resulting in deterioration of the OLED material

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