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33results about How to "Evaporation rate is stable" patented technology

Evaporating device and evaporating method

The invention provides an evaporating device and an evaporating method. According to the evaporating device disclosed by the invention, a crystal oscillator sheet baffle plate is arranged between an evaporation source and a crystal oscillator sheet, and the crystal oscillator sheet baffle plate can switch between two positions, namely a position shielding the crystal oscillator sheet and a position not shielding the crystal oscillator sheet; when the crystal oscillator sheet baffle plate is in the position shielding the crystal oscillator sheet, evaporation material deposits to the crystal oscillator sheet baffle plate, so as to prevent the evaporation material from depositing to the crystal oscillator sheet; and when the crystal oscillator sheet baffle plate is in the position not shielding the crystal oscillator sheet, the evaporation material deposits to the crystal oscillator sheet. When the evaporation device disclosed by the invention is applied to an evaporation process, in theinitial stage of evaporation, namely the evaporation stage of impurities on the surface of to-be-evaporated material, the crystal oscillator sheet baffle plate is in the position shielding the crystaloscillator sheet, so as to prevent impurities from depositing to the surface of the crystal oscillator sheet; and after evaporation of the impurities on the surface of the to-be-evaporated material is completed, the crystal oscillator sheet baffle plate is in the position not shielding the crystal oscillator sheet, and the evaporation material deposits to the surface of the crystal oscillator sheet, so that an evaporation rate monitoring device acquires a steady evaporation rate.
Owner:SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD

Evaporation crucible

The invention discloses an evaporation crucible, and belongs to the technical field of OLED manufacturing. The evaporation crucible comprises a crucible body and heat conduction components, wherein the heat conduction components are arranged in the crucible body and are used for directly transmitting heat on the crucible body to an evaporation material located in the middle of the crucible body. The heat conduction components are arranged in the crucible body, and the heat of the crucible body is directly transmitted to the evaporation material located in the middle of the crucible body through the heat conduction components, so that the temperature difference between the evaporation material located in the middle of the crucible body and an evaporation material close to the inner wall of the crucible body is reduced; the phenomenon that the evaporation material located in the middle of the crucible body remains and is caked to remain in the crucible body is avoided, and the utilization rate of the evaporating materials is improved; and it is ensured that the whole evaporation speed of the evaporation materials in the crucible body is stable, and the evaporation film formation effect is ensured, so that the performance of a device is ensured, and the performance of the evaporation material in the middle of the crucible body is also ensured
Owner:BOE TECH GRP CO LTD +1

Wire feeding mechanism of vacuum film plating machine

The invention provides a wire feeding mechanism of a vacuum film plating machine. The wire feeding mechanism comprises a wire supplying disc, a wire feeding mechanism body, a wire discharging nozzle and a heating crucible. The wire discharging nozzle extends into the heating crucible. The wire feeding mechanism body comprises a wire feeding rotating shaft, multiple wire feeding rolls and a power device, wherein the wire feeding rolls are fixed to the wire feeding rotating shaft; the power device provides power for the wire feeding rotating shaft; and the two ends of each wire feeding roll are provided with a wire protection sleeve and a wire pressing block. The wire feeding mechanism has the beneficial effects that the wire feeding speed of each evaporation boat is controlled through different diameters of the wire feeding rolls, thus the wire feeding amount is controlled; square resistance uniformity of a product is improved; product quality is improved; by arranging the wire pressing blocks, a metal wire in the conveying process can be located, the tail end of the aluminum wire can be constrained, and thus the tail end of the aluminum wire can be effectively prevented from sliding on a heating source; furthermore, the situation that generated aluminum chippings splash to an aluminum-plated film to damage the aluminum-plated film is prevented; and production quality of the aluminum-plated film is effectively guaranteed.
Owner:TONGLING CHAOYUE ELECTRON CO LTD

Vacuum coating machine evaporation crucible

The invention provides a vacuum coating machine evaporation crucible. The vacuum coating machine evaporation crucible comprises an accommodating cavity for accommodating heated materials, a heating cavity surrounding the periphery of the accommodating cavity and an outer wall enclosing the heating cavity; the heating cavity is sequentially provided with an upper heating unit and a lower heating unit from top to bottom, wherein the upper heating unit is used for ensuring the effect that the temperature of an evaporating opening is higher than the condensation point of evaporated materials, the temperature of the upper heating unit is controlled separately, the lower heating unit is located on the periphery of the crucible, and the temperature of the lower heating unit is controlled separately; the top of the heating cavity is provided with a runner used for allowing the heated materials to pass, and the top end of the runner is provided with an opening; the diameter of the two ends of the runner is larger than that of the middle of the runner; and the diameter of the end, provided with the opening, of the runner is smaller than the inner diameter of the accommodating cavity. The vacuum coating machine evaporation crucible has the beneficial effects that the temperatures of different parts of the crucible are convenient to control through design of two heat supply systems, the temperature of the top of the crucible is slightly higher than the evaporating temperature of the materials, and thus material condensation can be avoided; and the stability of the evaporating speed of the materials is achieved by precisely controlling the evaporating temperature.
Owner:铜陵市铜创电子科技有限公司

Evaporation device and evaporation equipment

The invention provides an evaporation device and evaporation equipment. The evaporation device comprises an evaporation container and an anti-blocking cap which are connected or separated from each other; the anti-blocking cap comprises a first outlet, a first side wall, a first blade, a first opening, a second blade, a second opening and heating wires; the first side wall surrounds the first outlet; the first blade and the second blade are positioned in the first outlet and are fixed on the first side wall; the first blade surrounds the first opening; the second blade surrounds the second opening; the second opening is smaller than the first opening; the heating wires are arranged in the first side wall, the first blade and the second blade. The anti-blocking cap avoids instant large fluctuation of evaporation gas caused by melting, boiling or collapsing of evaporation raw materials in an evaporation container, and the emitting speed of the evaporation gas on the anti-blocking cap isstable. Therefore, the evaporation device realizes a stable evaporation rate, and further realizes an excellent evaporation effect; and in addition, the anti-blocking cap prevents the evaporation gasfrom being condensed on the second outlet of the evaporation container to cause blocking.
Owner:XIAMEN TIANMA MICRO ELECTRONICS

Evaporation device and evaporation method

The invention provides an evaporation device and an evaporation method. The vapor deposition device of the present invention is provided with a crystal vibrating plate shielding plate between the evaporation source and the crystal vibrating plate, and the crystal vibrating plate shielding plate can be switched between the two positions of shielding the crystal vibrating plate and not shielding the crystal vibrating plate; When the position of the crystal oscillator is not blocked, the evaporation material is deposited on the crystal oscillator plate, thereby avoiding the evaporation material from being deposited on the crystal oscillator plate; when the crystal oscillator plate shielding plate is in a position that does not block the crystal oscillator plate, the evaporation material can be deposited on the crystal oscillator plate; the present invention When the evaporation device is applied to the evaporation process, in the initial stage of evaporation, that is, the evaporation stage of the surface impurities of the material to be evaporated, the crystal oscillator shielding plate is in the position of blocking the crystal oscillator to prevent impurities from depositing on the surface of the crystal oscillator; After the impurities on the surface of the evaporation material are evaporated, the shielding plate of the crystal oscillator is in a position not to block the crystal oscillator, the evaporation material is deposited on the surface of the crystal oscillator, and the deposition rate monitoring device obtains a stable evaporation rate.
Owner:SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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