Crucible to prevent splashing and plugging of evaporation materials

Abstract

The invention provides a crucible for preventing evaporation materials from splashing and hole plugging, comprising a crucible body (1) for accommodating evaporation materials (2), and a cover body (3) covering the opening end of the crucible body (1) ); the lid (3) includes a loam cake (31), a lower lid (33) and a connecting portion (32) connecting the loam cake (31) and the lower lid (33); the loam cake (31) It is spaced apart from the lower cover (33) along the axial direction of the crucible body (1); several upper air outlets (313) are arranged in the upper opening area (311) of the upper cover (31), and the lower cover (33) Several lower air outlets (333) are arranged in the lower opening area (331), and the several upper air outlets (313) do not overlap with the several lower air outlets (333). The invention can improve the heat balance inside the large-diameter crucible and the balance between temperature and evaporation rate, solve the problems of unstable evaporation rate, easy blockage of air holes and material splashing during pre-melting, improve the stability of the evaporation process, and improve the evaporation rate. Plating equipment utilization rate.

Description

technical field [0001] The invention relates to the field of manufacturing processes of organic electroluminescent display devices, in particular to a crucible for preventing vapor deposition materials from splashing and plugging holes. Background technique [0002] Flat panel display devices have many advantages such as thin body, power saving, and no radiation, and have been widely used. Existing flat panel display devices mainly include liquid crystal display devices (Liquid Crystal Display, LCD) and organic electroluminescent display devices (Organic Light Emitting Display, OLED). Among them, compared with LCD, OLED display device not only has very excellent display performance, but also has the characteristics of all solid state, self-illumination, simple structure, ultra-thin, fast response speed, wide viewing angle, low power consumption and flexible display. Known as the "dream display", it has been favored by major display manufacturers and has become the main forc...

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a crucible that prevents splashing of evaporation materials and plug holes, which can improve the heat balance inside the large-diameter crucible and the balance between temperature and evaporation rate, and solve the problem of unstable evaporation rate, easy blockage of air outlets and pre-heating. Solve the problem of material splashing during melting, improve the stability of the evaporation process, and increase the utilization rate of the evaporation equipment

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