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Evaporation device and evaporation equipment

A technology of evaporation and equipment, which is applied in the display field and can solve the problems of unstable airflow and easy blockage of the outlet of the evaporation device.

Active Publication Date: 2020-04-17
XIAMEN TIANMA MICRO ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the outlet of vapor deposition device C is prone to clogging
The airflow of evaporation device C is unstable

Method used

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  • Evaporation device and evaporation equipment
  • Evaporation device and evaporation equipment
  • Evaporation device and evaporation equipment

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Embodiment Construction

[0028] In order to better understand the technical solutions of the present invention, the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0029] It should be clear that the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0030] Terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. As used in the embodiments of the present invention and the appended claims, the singular forms "a", "said" and "the" are also intended to include the plural forms unless the context clearly indicates otherwise.

[0031] It should be understood that the term "an...

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Abstract

The invention provides an evaporation device and evaporation equipment. The evaporation device comprises an evaporation container and an anti-blocking cap which are connected or separated from each other; the anti-blocking cap comprises a first outlet, a first side wall, a first blade, a first opening, a second blade, a second opening and heating wires; the first side wall surrounds the first outlet; the first blade and the second blade are positioned in the first outlet and are fixed on the first side wall; the first blade surrounds the first opening; the second blade surrounds the second opening; the second opening is smaller than the first opening; the heating wires are arranged in the first side wall, the first blade and the second blade. The anti-blocking cap avoids instant large fluctuation of evaporation gas caused by melting, boiling or collapsing of evaporation raw materials in an evaporation container, and the emitting speed of the evaporation gas on the anti-blocking cap isstable. Therefore, the evaporation device realizes a stable evaporation rate, and further realizes an excellent evaporation effect; and in addition, the anti-blocking cap prevents the evaporation gasfrom being condensed on the second outlet of the evaporation container to cause blocking.

Description

【Technical field】 [0001] The invention relates to the field of display technology, in particular to an evaporation device and evaporation equipment. 【Background technique】 [0002] In display technology, organic light emitting display panel (Organic Light Emitting Diode, OLED) is widely used in the industry due to its thinness, active light emission, fast response speed, wide viewing angle, rich color and high brightness, low power consumption, and high and low temperature resistance. It is recognized as the third generation display technology following the liquid crystal display panel (Liquid Crystal Display, LCD). [0003] figure 1 It is a structural schematic diagram of an evaporation device in the related art. [0004] Such as figure 1 As shown, in the related art, the organic light-emitting layer of the organic light-emitting display panel P is evaporated using an evaporation device C. The evaporation device C includes an outlet, a side wall, a bottom plate and an i...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/12H01L51/56
CPCC23C14/24C23C14/246C23C14/12H10K71/164H10K71/00
Inventor 丁漫刘育豪姚祥戴铭志牛晶华
Owner XIAMEN TIANMA MICRO ELECTRONICS
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