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1754results about How to "Reduce temperature difference" patented technology

Metal-base film thermocouple and preparation method thereof

The invention belongs to a metal-base film thermocouple and a preparation method thereof. The thermocouple comprises a metal substrate to be tested and a NiCrAlY alloy transitional layer arranged on the top face of the metal substrate, wherein a metal aluminum layer, an AlN layer, an AlN ceramic insulation layer, a thermocouple film electrode assembly and an aluminum oxide protective layer are formed on the transitional layer in turn. The production method comprises: processing the metal substrate to be tested; preparing a composite substrate with the NiCrAlY alloy transitional layer; precipitating metal aluminum; nitriding the aluminum; sputtering and depositing the AlN insulation layer; and setting the film thermocouple group and covering the aluminum oxide protective layer. In the invention, the AlN ceramic material with high coefficient of heat conductivity and high insulating performance is used as the insulation layer, so the temperature difference between the metal substrate and the surface of the insulation layer and the thickness of the insulation layer are reduced considerably; and thus, the metal-base film thermocouple has the characteristics of effectively reducing measurement error, improving the consistency between the temperature measured by the thermocouple and the actual temperature of the metal substrate to be tested, improving reliability, providing accurate and reliable basis for the design of turbine engines, and the like.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA
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