Metal-base film thermocouple and preparation method thereof

A production method and technology of thermocouples, applied in thermoelectric device components, manufacturing/processing of thermoelectric devices, thermometers using electric/magnetic elements directly sensitive to heat, etc., can solve the problem of affecting measurement accuracy, consistency and reliability Poor performance, large insulation layer thickness and other problems, to achieve the effect of improving consistency and reliability, reliable design basis, and improving insulation performance
CN101894904AInactive Publication Date: 2010-11-24UNIV OF ELECTRONIC SCI & TECH OF CHINA
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
UNIV OF ELECTRONIC SCI & TECH OF CHINA
Publication Date
2010-11-24
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention belongs to a metal-base film thermocouple and a preparation method thereof. The thermocouple comprises a metal substrate to be tested and a NiCrAlY alloy transitional layer arranged on the top face of the metal substrate, wherein a metal aluminum layer, an AlN layer, an AlN ceramic insulation layer, a thermocouple film electrode assembly and an aluminum oxide protective layer are formed on the transitional layer in turn. The production method comprises: processing the metal substrate to be tested; preparing a composite substrate with the NiCrAlY alloy transitional layer; precipitating metal aluminum; nitriding the aluminum; sputtering and depositing the AlN insulation layer; and setting the film thermocouple group and covering the aluminum oxide protective layer. In the invention, the AlN ceramic material with high coefficient of heat conductivity and high insulating performance is used as the insulation layer, so the temperature difference between the metal substrate and the surface of the insulation layer and the thickness of the insulation layer are reduced considerably; and thus, the metal-base film thermocouple has the characteristics of effectively reducing measurement error, improving the consistency between the temperature measured by the thermocouple and the actual temperature of the metal substrate to be tested, improving reliability, providing accurate and reliable basis for the design of turbine engines, and the like.
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Description

technical field

[0001] The invention belongs to the field of sensor production technology and measurement technology for turbine blades, in particular to a thin-film thermocouple made of turbine engine blades to be measured as a substrate (material) and a production method thereof. This type of thermocouple can be widely used in Measure the surface temperature distribution of turbine engine blades, combustion chambers, etc., and provide corresponding basic data basis for the design of turbine engines. Background technique

[0002] In modern aero-engine technology, the harsh gas environment such as high temperature and high pressure generated by gas combustion will cause the surface temperature of the turbine blade and the combustion chamber to rise sharply, and at the same time generate a large thermal strain, while the temperature of the turbine blade and the surface of the combustion chamber The distribution and thermal strain have a great influence on the performance and ...

Claims

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