Evaporation source device

An evaporation source and evaporation boat technology, applied in the field of OLED display, can solve the problems of current or voltage control lag, low temperature control accuracy, slow heating process, etc., to achieve stable evaporation rate, precise control of evaporation temperature, easy and accurate control effect

Inactive Publication Date: 2015-12-30
SICHUAN CCO DISPLAY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The existing thermal evaporation source has a simple structure and a mature process, but there are many shortcomings: first, the heating process is slow, and the temperature has a slow rising process after the resistance wire is energized; second, the temperature control accuracy is not high, whether it is current or voltage Control lags

Method used

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  • Evaporation source device

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Embodiment Construction

[0010] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

[0011] Such as figure 1 As shown, the evaporation source of the present invention includes an evaporation boat 1 and a hollow pipe 2, and the hollow pipe 2 is evenly wound on the outside of the evaporation boat 1. In order to avoid heat loss as much as possible, the hollow pipe 2 is close to the outer wall of the evaporation boat 1, and the hollow pipe 2 2 There is a circulating medium inside, and the circulating medium is divided into a heating circulating medium and a cooling circulating medium.

[0012] When evaporation is required, the evaporation material is first put into the evaporation boa...

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Abstract

The invention discloses an evaporation source device which comprises an evaporation boat and hollow pipelines, wherein the hollow pipelines are tightly clung to the outer side of the evaporation boat in a uniform winding manner; circulating mediums are introduced into the hollow pipelines, and comprise a heating circulating medium and a cooling circulating medium. The evaporation source device adopts the manner that the circulating mediums are directly used for heating and cooling; after the heating circulating medium is quickly introduced, the evaporation time of an evaporation material can be reached within a quite short time period; after the cooling circulating medium is quickly introduced, the evaporation boat can be quickly cooled after the evaporation is completed, the evaporation material is saved, and the evaporation cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of OLED display, and in particular relates to an evaporation source device. Background technique [0002] Organic electroluminescent display AMOLED is regarded as a new flat panel display technology with the greatest development potential after LCD and PDP. Due to its outstanding performance advantages, it has attracted the attention of many countries and enterprises in the world. start-up phase. [0003] In the current OLED manufacturing, thin film battery manufacturing, coating and other processing technologies, the thermal evaporation source heating material is generally used for coating. The thermal evaporation source is mainly composed of an evaporation boat and a heating resistance wire. The evaporation boat is mainly used to hold evaporation materials. It is made of stainless steel, boron nitride, silicon, quartz and other materials. The shape is mainly cylindrical or conical. A fixed heating resist...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
Inventor 唐元刚林成勇
Owner SICHUAN CCO DISPLAY TECH
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